Study of Nucleation of CVD Diamond by DC Arcjet Method

Abstract

Arcjet plasma enhanced CVD was used to grow diamond. Nucleation of diamond was studied at the early stage of growth cause. The micro-structural probes (transmission electron microscope (TEM), high resolution electronic microscope (HREM), selected area diffraction (SAD) and electron energy loss spectra (EELS) were used to characterize the nuclei. It was found that nuclei formed following the amorphous carbon formation. The critical nucleus size was deduced to be less than 20 nm. The growth of nucleus would form the network-like structure. The incubation period of nucleation was deduced as 6–8min under the condition of high concentration of CH4 in H2.