Study of silver cluster formation from thin films on inert surface

Белов, А. Н.; Bulyarsky, S.V.; Громов, Д. Г.; Pavlova, L.M.; Pyatilova, O. V.

doi:10.1016/j.calphad.2013.07.017

Cited by 21 publications

(15 citation statements)

References 23 publications

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“…This indicates a high non-uniformity in the sizes and shapes of the grains and the varying number of voids. Since germanium serves as a nucleation film for silver, the clusters of silver atoms behave as liquid droplets with low wetting angle as opposed to the case without using Ge [ 26 – 27 ]. Therefore, the silver grains located directly over the SiO 2 /Ge/Ag interface are large and flat – the in-plane (horizontal) sizes are large, but the out-of-plane (vertical) size is small.…”

Section: Resultsmentioning

confidence: 99%

Growth model and structure evolution of Ag layers deposited on Ge films

Ciesielski

Skowroński

Górecka

et al. 2018

Beilstein J. Nanotechnol.

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We investigated the crystallinity and optical parameters of silver layers of 10–35 nm thickness as a function 2–10 nm thick Ge wetting films deposited on SiO2 substrates. X-ray reflectometry (XRR) and X-ray diffraction (XRD) measurements proved that segregation of germanium into the surface of the silver film is a result of the gradient growth of silver crystals. The free energy of Ge atoms is reduced by their migration from boundaries of larger grains at the Ag/SiO2 interface to boundaries of smaller grains near the Ag surface. Annealing at different temperatures and various durations allowed for a controlled distribution of crystal dimensions, thus influencing the segregation rate. Furthermore, using ellipsometric and optical transmission measurements we determined the time-dependent evolution of the film structure. If stored under ambient conditions for the first week after deposition, the changes in the transmission spectra are smaller than the measurement accuracy. Over the course of the following three weeks, the segregation-induced effects result in considerably modified transmission spectra. Two months after deposition, the slope of the silver layer density profile derived from the XRR spectra was found to be inverted due to the completed segregation process, and the optical transmission spectra increased uniformly due to the roughened surfaces, corrosion of silver and ongoing recrystallization. The Raman spectra of the Ge wetted Ag films were measured immediately after deposition and ten days later and demonstrated that the Ge atoms at the Ag grain boundaries form clusters of a few atoms where the Ge–Ge bonds are still present.

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Section: Resultsmentioning

confidence: 99%

Growth model and structure evolution of Ag layers deposited on Ge films

Ciesielski

Skowroński

Górecka

et al. 2018

Beilstein J. Nanotechnol.

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“…Moreover, in some cases the aggregation of clusters in the initial samples was observed. However, annealing in the specified temperature range results in a complete separation of clusters from each other, which has been demonstrated in [31]. This allows to ascertain the following fact:…”

Section: Resultsmentioning

confidence: 81%

“…when prolonged exposure of silver vapor on the surface takes place. This means that the deposition surface is heated during condensation of silver to a temperature higher than 623 K. Coalescence was observed in the decay of the thin film of silver to the droplets at a temperature of 930 K [30,31].…”

Section: Discussionmentioning

confidence: 97%

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Formation of gold and silver cluster arrays using vacuum-thermal evaporation on a non-heated substrate

et al. 2014

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In the present work we investigated silver and gold cluster array formation on non-heated thin film substrate of amorphous carbon by means vacuum-thermal evaporation of small quantity of material. In basic experiments two series of samples with a different thickness (1-20 nm) were prepared from weight portion 0.6-11 mg, the distance between evaporator and deposition surface was 20 cm. The investigation of the samples of both series by TEM showed the significant dependence of the particle size and the density of their location on the surface on the quantity of condensing Ag and Au or on the virtual film thickness. The interesting results obtained in the work formed the basis of the model which expands understanding condensation processes, nucleation and growth of the crystalline phase from the gas phase.

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“…Диаметр кластеров зависит от толщины и состава исходной пленки, времени и температуры отжига, мощности плазмы и концентрации подаваемых газов и в дальнейшем напрямую влияет на диаметр синтезируемых УНТ. При повышении температуры наблюдается коалесценция -сливание нескольких капель в одну с увеличением их характерного размера и разрежением плотности по поверхности [7]. В то же время идет процесс медленного испарения капель малого размера, за счет чего их средний диаметр уменьшается.…”

Section: Comunclassified

Controlling of Carbon Nanotubes Concentration in VLSI Metallization Based on Metal Ma-trix – CNT Composite Conductors

Kondratiev¹

2017

PofUE

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Методика регулирования концентрации углеродных нанотрубок (УНТ) включает в себя три стадии. На первой, до синтеза нанотрубок, проводится литографическая фрагментация катализатора при условии его формирования с помощью «фазового расслоения», фрагментации неактивным металлом, регулирования длительности электрохимического осаждения либо структуризации под самоформирующиеся массивы. На второй стадии должны соблюдаться определенные условия синтеза УНТ, способствующие формированию разреженных структур. Третья стадия, применяемая в случае необходимости, предусматривает лазерное структурирование либо извлечение областей массивов вклеиванием в промежуточную подложку. В зависимости от задач и технологических возможностей допускаются и другие комбинации описанных методов. Отмечена важность регулирования концентрации УНТ в формируемой электрохимическими методами композитной металлизации интегральных схем. Вопрос рассмотрен с позиции как технологических возможностей, так и необходимости получения требуемых характеристик. Описаны оба варианта электрохимического формирования композитов, такие как осаждение меди в предварительно выращенные массивы УНТ и одновременное осаждение меди и УНТ. Представленная методика совместима с технологиями СБИС и 3D ИС и позволяет получать образцы композитных проводников с прогнозируемыми и регулируемыми концентрациями УНТ, что напрямую влияет на характеристики создаваемых структур.

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Study of silver cluster formation from thin films on inert surface

Cited by 21 publications

References 23 publications

Growth model and structure evolution of Ag layers deposited on Ge films

Growth model and structure evolution of Ag layers deposited on Ge films

Formation of gold and silver cluster arrays using vacuum-thermal evaporation on a non-heated substrate

Controlling of Carbon Nanotubes Concentration in VLSI Metallization Based on Metal Ma-trix – CNT Composite Conductors

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