Study of the Au‐Cr bilayer system using X‐ray reflectivity, GDOES, and ToF‐SIMS

Abstract

We study a Au (25 nm)/Cr (10 nm) bilayer system as a model of mirror for the soft x-ray energy range. The Au and Cr thin films are a few nanometers thick and are deposited on a float glass substrate. The sample is characterized using three complementary techniques: soft x-ray reflectivity (XRR), glow discharge optical emission spectrometry (GDOES) and time of flight secondary ion mass spectroscopy (ToF-SIMS). XRR provides information about the thickness and roughness of the different layers while GDOES is used to obtain the elemental depth profile of the stack and ToF-SIMS to obtain the elemental and chemical depth profile. GDOES and ToF-SIMS have both a nanometer depth resolution. A coherent description of the bilayer stack is obtained through the combination of these techniques. It consists in five layers namely a surface contamination layer, a principal gold layer, a Au-Cr mixed layer, a Cr layer and another contamination layer at the top of the substrate.

Interdiffusion behaviors observation in TiN/ZrO N bilayer by XAS and ToF-SIMS

“…ToF-SIMS has already been demonstrated to be a useful tool to obtain the elemental and chemical depth profiles in multilayers [19,39,41]. In this paper the According to the Ref.…”