Study of the Characteristics of Inorganic Layers Obtained by Plasma-Chemical Precipitation on Polymers

Abstract

-Inorganic f i l m s obtained on t h e polymer support during plasma--chemical s y n t h e s i s have i n v e s t i g a t e d by XPS, IR-reflectance spectroscopy and SEM. The l a y e r s of S i N ALN, SiO were obtained of plasma chimical p r e 3 4' 2 c i p i t a t i o n on t h e s u r f a c e of polyimide f i l m s . The r e s u l t s of XPS i n v e s t i g at i o n s showed t h a t t h e polymer support t a k e s an a c t i v e p a r t i n t h e formation of t h e inorganic film. The d a t a of e l e c t r o n microscopy i n t h e i n i t i a l s t a g e s of f i l m growth i n d i c a t e t h a t i n t h e f i r s t s t a g e n u c l e i a r e formed. They a r e uniformly d i s t r i b u t e d on t h e s u r f a c e of t h e polymer support and e x h i b i t a pronounced d e n d r i t e s t r u c t u r e . The experimental r e s u l t s suggest t h a t under experimental c o n d i t i o n s m8,kea it p o s s i b l e t o o b t a i n v a r i o u s polymer-inorgan i c s t r u c t u r e devoid of t h e i n t e r f a c e .INTRODUCTION A t present t h e plasma-chemical treatment of v a r i o u s m a t e r i a l s i n c l u d i n g polymers i s one of t h e most r a p i d l y developing t r e n d s i n m a t e r i a l science. The plasma-chemical p r e c i p i t a t i o n of various inorganic Layers ( S i N