1989
DOI: 10.1149/1.2096744
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Study of the Contact Resistance of Electroless Ni‐B Doped Silicon Using Sodium Borohydride as Reducing Agent

Abstract: Ohmic contacts to p-type silicon having resistivity of the order of 5 ~-cm and orientation were fabricated by an electroless Ni-B process. It has been found that boron content in the deposit varies from 5-27% using sodium borohydride as the reducing agent. The contact resistance decreases as the boron content in the deposit increases with heat~treatment.

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Cited by 6 publications
(4 citation statements)
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“…J. T. Liu reported a bath containing NaBH 4 as the reducing agent for making ohmic contact to p-type silicon, but not many details are available [25]. Singh et al [26] used Liu's solution and varied the pH and temperature (only two different temperatures) to study the deposition. However, there was no mention of the thickness of the deposited films, nor the exact amount of borohydride solution required for the plating bath.…”
Section: Introductionsupporting
confidence: 69%
“…J. T. Liu reported a bath containing NaBH 4 as the reducing agent for making ohmic contact to p-type silicon, but not many details are available [25]. Singh et al [26] used Liu's solution and varied the pH and temperature (only two different temperatures) to study the deposition. However, there was no mention of the thickness of the deposited films, nor the exact amount of borohydride solution required for the plating bath.…”
Section: Introductionsupporting
confidence: 69%
“…Most authors of reports on electroless Ni-B deposition have focused on physical properties involving hardness, solderability, and electrical conductivity (El-Mallah and Abbas, 1989; Gorbunova et al, 1973; Singh et al, 1989; Tanabe and Watanabe, 1972). These few papers were concerned with the mechanism of the heterogeneous reaction in an electroless Ni-B bath, but no paper was concerned with the mechanisms of the homogeneous reaction.…”
Section: Introductionmentioning
confidence: 99%
“…To date, such films have mainly been deposited by electroless plating methods, 1-11 and their applications have also been studied. [12][13][14][15][16][17][18] However, very few studies have been undertaken on Ni-B alloy films produced by electroplating methods.…”
mentioning
confidence: 99%
“…To date, such films have mainly been deposited by electroless plating methods, [1][2][3][4][5][6][7][8][9][10][11] and their applications have also been studied. [12][13][14][15][16][17][18] However, very few studies have been undertaken on Ni-B alloy films produced by electroplating methods. [19][20][21] Most reports discuss alloy films with a boron content of under 25 atom %, which have the stable phases of Ni and Ni 3 B according to the Ni-B binary phase diagram.…”
mentioning
confidence: 99%