Study of the Conversion of Carbon-containing and Organochlorine Impurities in the Process of Hydrogen Reduction of Silicon Tetrachloride by RF (40.68 MHz) Arc Discharge.

Abstract

A contracted RF (40.68 MHz) arc discharge of atmospheric pressure, stabilized between two rod electrodes, was used to obtain trichlorosilane by the reaction of hydrogen reduction of silicon tetrachloride (SiCl<sub>4</sub>). In model mixtures of macro-composition in the ratio H<sub>2</sub>/SiCl<sub>4</sub>/CCl<sub>4</sub>=10/1/1, it was shown that C and SiC are the main solid-phase product which are deposited on the surface of electrodes in the form of dendrides. The temperature of the ends of the electrodes determined using emission thermometry is 1600 K. The thermodynamic analysis of H<sub>2</sub>+SiCl<sub>4</sub>+CCl<sub>4</sub> system confirms that the formation of C and SiC occurs in the temperature range of 1600 K. The deposition of solid-phase products occurs on the electrodes in the zone of high electric field strength.