2012
DOI: 10.1088/1009-0630/14/12/08
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Study of the Discharge Mode in Micro-Hollow Cathode

Abstract: In this study, micro-hollow cathode discharge (MHCD) is investigated by a fluid model with drift-diffusion approximation. The MHC device is a cathode/dielectric/anode sandwich structure with one hole of a diameter D=200 µm. The gas is a Ne/Xe mixture at a pressure p=50∼500 Torr. The evolutions of the discharge show that there are two different discharge modes. At larger pD the discharge plasma and high density excited species expand along the cathode surface and, a ringed discharge mode is formed. At smaller p… Show more

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Cited by 5 publications
(2 citation statements)
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References 17 publications
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“…With a current lower than 7.5 mA, the voltagecurrent curve presents a similar trend with that of the covered MHCD. However, with a current higher than 7.5 mA, V g slightly decreases first and then remains almost constant with increasing current, which is similar to the phenomenon reported by others [46][47][48]. The constant V g with varying current results from the plasma extending outside the cathode hole [19,26,27].…”
Section: Resultssupporting
confidence: 87%
“…With a current lower than 7.5 mA, the voltagecurrent curve presents a similar trend with that of the covered MHCD. However, with a current higher than 7.5 mA, V g slightly decreases first and then remains almost constant with increasing current, which is similar to the phenomenon reported by others [46][47][48]. The constant V g with varying current results from the plasma extending outside the cathode hole [19,26,27].…”
Section: Resultssupporting
confidence: 87%
“…Figure 2(b) illustrates the mesh distribution used in the simulation. The numerical scheme of this model was described in reference [27].…”
Section: Simulation Modelmentioning
confidence: 99%