Study Of The Gas Balance By Injection Of Hydrocarbons Into The Plasma Simulator PSI 2

Abstract

Abstract. The stationary plasma of the plasma generator PSI 2 is used to study the gas balance of hydrocarbons and hydrogen by means of mass spectrometers. For this purpose H 2 , acetylene and ethylene are injected into argon and hydrogen plasmas. Several mono-layers of a-C:H are formed after only a few minutes of injection. It is found that hydrogenation of the hydrocarbon layers is strongly influenced by the hydrocarbon species injected previously. Furthermore, time constants of more than 1000 s for achieving stationary conditions are identified in some cases. The H/C ratio of the hydrocarbon layers is found to vary from about 1 to 1.4 for argon and hydrogen plasmas, respectively. PACS :81.05, 91.15-z , 52.40 Hf