Study of the Influence of Phase Noise on the MEMS Disk Resonator Gyroscope Interface Circuit

Zhang, Wenbo; Chen, Weiping; Yin, Liang; Di, Xinpeng; Chen, Dongliang; Fu, Qiang; Zhang, Yufeng; Liu, Xiaowei

doi:10.3390/s20195470

Cited by 7 publications

(2 citation statements)

References 49 publications

(59 reference statements)

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“…The operating mode of a hemispherical resonant gyroscope resonator is a four-antinode vibration mode (i.e., the number of waves in the annulus m = 2), and the finite element model of the hemispherical resonator is shown in Figure 1 [ 13 ]. The mode is synthesized from two simple merged modes, both 45° apart in the direction of the antinode axis, which are the driving and detecting modes of the hemispherical gyro, as shown in Figure 2 a,b.…”

Section: Device Architecture Of Capacitive Displacement Detectionmentioning

confidence: 99%

Weak Capacitance Detection Circuit of Micro-Hemispherical Gyroscope Based on Common-Mode Feedback Fusion Modulation and Demodulation

Zhang

Zhuang

et al. 2023

Micromachines

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As an effective capacitance signal produced by a micro-hemisphere gyro is usually below the pF level, and the capacitance reading process is susceptible to parasitic capacitance and environmental noise, it is highly difficult to acquire an effective capacitance signal. Reducing and suppressing noise in the gyro capacitance detection circuit is a key means to improve the performance of detecting the weak capacitance generated by MEMS gyros. In this paper, we propose a novel capacitance detection circuit, where three different means are utilized to achieve noise reduction. Firstly, the input common-mode feedback is applied to the circuit to solve the input common-mode voltage drift caused by both parasitic capacitance and gain capacitance. Secondly, a low-noise, high-gain amplifier is used to reduce the equivalent input noise. Thirdly, the modulator–demodulator and filter are introduced to the proposed circuit to effectively mitigate the side effects of noise; thus, the accuracy of capacitance detection can be further improved. The experimental results show that with the input voltage of 6 V, the newly designed circuit produces an output dynamic range of 102 dB and the output voltage noise of 5.69 nV/√Hz, achieving a sensitivity of 12.53 V/pF.

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Section: Device Architecture Of Capacitive Displacement Detectionmentioning

confidence: 99%

Weak Capacitance Detection Circuit of Micro-Hemispherical Gyroscope Based on Common-Mode Feedback Fusion Modulation and Demodulation

Zhang

Zhuang

et al. 2023

Micromachines

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“…They are widely used in science, technology, the military, and other fields [ 4 , 5 , 6 ]. Compared with traditional gyroscopes, silicon gyroscopes based on microelectromechanical system (MEMS) technology and CMOS technology have the characteristics of low cost, small size, low power consumption, high reliability, and mass producibility [ 7 , 8 ]. The silicon gyroscope interface circuit is required, to bring the gyroscope structure into resonance, and the angular velocity can be detected using the Coriolis force principle.…”

Section: Introductionmentioning

confidence: 99%

Research on a Silicon Gyroscope Interface Circuit Based on Closed-Loop Controlled Drive Loop

Ding

Liu

et al. 2022

Sensors

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The existing analysis methods for the silicon gyroscope drive loop, such as the perturbation method and period average method, cannot analyze the dynamic characteristics of the system. In this work, a linearized amplitude control model of the silicon gyroscope drive loop was established to analyze the stability and set-up time of the drive loop, and the vibration conditions of the silicon gyro were obtained. According to the above results, a new silicon gyroscope interface circuit was designed, using a 0.35 mm Bipolar-CMOS-DMOS (BCD) process, and the chip area was 4.5 mm × 4.0 mm. The application-specific integrated circuit (ASIC) of the silicon gyroscope was tested in combination with the sensitive structure with a zero stability of 1.14°/hr (Allen). The test results for the ASIC and the whole machine prove the correctness of the theoretical model, which reflects the effectiveness of the stability optimization of the closed-loop controlled drive loop of the silicon gyroscope circuit.

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Effects of material and dimension on TCF, frequency, and Q of radial contour mode AlN-on-Si MEMS resonators

2021

Journal of Electronic Science and Technology

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Study of the Influence of Phase Noise on the MEMS Disk Resonator Gyroscope Interface Circuit

Cited by 7 publications

References 49 publications

Weak Capacitance Detection Circuit of Micro-Hemispherical Gyroscope Based on Common-Mode Feedback Fusion Modulation and Demodulation

Weak Capacitance Detection Circuit of Micro-Hemispherical Gyroscope Based on Common-Mode Feedback Fusion Modulation and Demodulation

Research on a Silicon Gyroscope Interface Circuit Based on Closed-Loop Controlled Drive Loop

Effects of material and dimension on TCF, frequency, and Q of radial contour mode AlN-on-Si MEMS resonators

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