2008
DOI: 10.1063/1.2936847
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Study of tunneling mechanism of Au nanocrystals in HfAlO matrix as floating gate memory

Abstract: A floating gate memory structure containing HfAlO control gate, self-organized Au nanocrystals (NCs), and a HfAlO tunnel layer has been fabricated by pulsed-laser deposition. Owing to the charging effects of Au NCs, a significant threshold voltage shift has been obtained and the memory window up to 10.0V and stored charge density up to 1×1014∕cm2 has been achieved. Fowler–Nordheim tunneling mechanism is used to analyze the capacitance-voltage characteristics of the trilayer memory structure, and it is found th… Show more

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Cited by 24 publications
(21 citation statements)
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“…[3][4][5][6][7][8][9] However, achieving large-area ordering of AuNPs as required in these applications has proven to be challenging. [10][11][12][13] Methods in synthesis and self-assembly appear to play important roles in the quality of the self-assembled monolayers.…”
Section: ' Introductionmentioning
confidence: 99%
“…[3][4][5][6][7][8][9] However, achieving large-area ordering of AuNPs as required in these applications has proven to be challenging. [10][11][12][13] Methods in synthesis and self-assembly appear to play important roles in the quality of the self-assembled monolayers.…”
Section: ' Introductionmentioning
confidence: 99%
“…Since very thin tunnelling oxide was used in memory devices, a large memory window could be obtained by the application of low program-erase operating voltages. High dielectric constant (high-k) materials are also reported to be used as gate dielectric layers [43]. The programmable memory characteristics of gold nanoparticle-based memory devices with HfAlO tunnelling/blocking oxide layers are reported.…”
Section: Operations Of Non-volatile Memory Devicesmentioning
confidence: 99%
“…Materials with a high dielectric constant reportedly act as a gate dielectric layer. [25] There is a report on the programmable memory characteristics of gold nanoparticle-based memory devices with HfAlO tunneling/blocking oxide layers. The report also explains how gold nanoparticles can be synthesized in situ by annealing the substrate during pulsedlaser deposition of gold (at 300°C and 550°C).…”
Section: Silicon-based Nfgm Devicesmentioning
confidence: 99%