Study on cathode spot motion and macroparticles reduction in axisymmetric magnetic field-enhanced vacuum arc deposition

Lang, Wenchang; Xiao, Jin; Gong, Jun; Sun, Chao; Huang, Renkun; Wen, Liping

doi:10.1016/j.vacuum.2010.01.037

Cited by 32 publications

(18 citation statements)

References 19 publications

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“…In this case, however, the patented cathode ring helps to confine the plasma and charged particles near the cathodes, as explained in [22]. It is known that a higher magnetic field leads to faster arc movement on the cathode surface and results in less evaporation and deposition rate [23], just as observed here. As reduced deposition rate means fewer particles per time interval and thus less energy input, the adatom mobility could actually be reduced and favour the metastable cubic phase in AlTiN, in contrast to what is observed with conventional cathode arrangements allowing uncontrolled outward streaming of charged particles.…”

Section: Coating Analysissupporting

confidence: 53%

Effect of Hexagonal Phase Content on Wear Behaviour of AlTiN Arc PVD Coatings

Kohlscheen

Bareiss

2018

Coatings

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In this study, the effect of increasing aluminum content and magnetic steering field strength on the structure and wear behavior of arc PVD AlTiN coatings is discussed. Deposition was done by means of an industrial-scale PVD unit for tool coating. The aluminium content in the AlTi source material was increased from 67 to 73 at.%. We applied two settings of the magnetic field that steers the arc across the cathode surface thereby evaporating the AlTi alloy differently. The resulting coating thickness ranged from 3.5 to about 7 µm. Cemented tungsten carbide was used as substrate material. Coating properties like hardness, adhesion, and crystal phases were analyzed by indentation and X-ray diffraction, respectively. The wear behaviour of the different AlTiN hard coatings were investigated in two ways. In a first idealized test, cyclic impacting was done applying a constant force. The resulting wear pattern was quantified by an Alicona multi-focus microscope. A second wear test was done by metal cutting under realistic conditions. Fly milling of ductile cast iron (EN-GJS-700) was performed with regular interruptions in order to measure the increasing wear mark. As expected, aluminium contents above 67 at.% (in the metal fraction of the coating) lead to a decreased wear resistance as the soft hexagonal phase exceeds values of a few vol.%. However, it was found that the formation of the hexagonal phase can be effectively influenced and delayed by increasing the magnetic steering field at the cathode. The wear behavior observed in cyclic impact testing corresponds well to results obtained with the more complex loading situation encountered in milling.

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Section: Coating Analysissupporting

confidence: 53%

Effect of Hexagonal Phase Content on Wear Behaviour of AlTiN Arc PVD Coatings

Kohlscheen

Bareiss

2018

Coatings

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“…• Circular motion in the edge area: when the coil current was in the low condition, the cathode spot moved on the cathode surface edge area, according to the cathode spot motion control mechanism motion in the RMF mode; • Contraction motion in the middle area: when the coil current changed from the low to the high value, an oblique magnetic field [14,24] appeared at the original position of the cathode spot (at the edge of the cathode surface), as shown in Figure 13a. An acute angle formed between the field vector and cathode surface faced the cathode center.…”

Section: Analysis and Discussionmentioning

confidence: 99%

“…An acute angle formed between the field vector and cathode surface faced the cathode center. According to the "acute angle rule" [14,22,24], the cathode spot primarily moved in retrograde and secondarily with Robson drift towards cathode center. So the cathode spot moved from the edge to the central area of the cathode surface, at this time; • Circular motion in the central area: when the coil current was in the high condition, the cathode spot moved on the central cathode area, according to the cathode spot motion control mechanism in the RMF mode; • Expansion motion in the middle area: when the coil current changed from the high to the low value, an oblique magnetic field appeared at the cathode central area and the acute angle faced the cathode edge, as shown in Figure 13b.…”

Section: Analysis and Discussionmentioning

confidence: 99%

Influence of a Scanning Radial Magnetic Field on Macroparticle Reduction of Arc Ion-Plated Films

et al. 2018

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Cathode spot motion influences the physical characteristics of arc plasma and the related macroparticles (MPs) in resultant films; these MPs limit the application of arc ion plating (AIP). In this paper, a scanning radial magnetic field (SRMF) was applied to the cathode surface to control the cathode spot motion and reduce the MP contamination in the deposited films. It was shown that film surface morphologies prepared using SRMF were better than those using a static radial magnetic field (RMF). The improvement was greater with increased scanning range and frequency. Using SRMF, cathode spot motion was confined to a spiral trajectory on the cathode surface and the spots moved over a large area and at a fast-moving velocity. Both the large moving area and the fast velocity decreased the temperature on the cathode surface and thus reduced the emission of the MPs.

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“…Details of the deposition of the TiN films were described in our former work. 20 The movement of arc spot under different process parameters was dynamically recorded by a camera through a color filter on the observation window. The exposure time of the camera was set as 0.001 s to get a distinct spot trace.…”

Section: Methodsmentioning

confidence: 99%

Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating

Lang¹,

Gao²,

Du³

et al. 2015

j nanosci nanotechnol

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Macroparticle contamination deteriorates the qualities and performances of protective coatings by arc ion plating, resulting in a limitation in their applications. In this work, the effects of transverse magnetic field (TMF), pulsed bias, gas pressure, and substrate position on behavior of the macro-particles (MPs) in TiN films are quantitatively investigated. It is demonstrated that the key factor of the deposition process on the MPs behavior is magnetic field, which controls the movement of arc spot significantly. At relatively low magnetic field intensity, the MPs behavior is greatly influenced by the other three process parameters. The sensibilities of the three parameters on MPs behavior are decreased with the increasing magnetic field intensity. At high magnetic field intensity, the MPs distribution keeps almost the same even when the other parameters are varied.

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Study on cathode spot motion and macroparticles reduction in axisymmetric magnetic field-enhanced vacuum arc deposition

Cited by 32 publications

References 19 publications

Effect of Hexagonal Phase Content on Wear Behaviour of AlTiN Arc PVD Coatings

Effect of Hexagonal Phase Content on Wear Behaviour of AlTiN Arc PVD Coatings

Influence of a Scanning Radial Magnetic Field on Macroparticle Reduction of Arc Ion-Plated Films

Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating

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