Study on classification and detection of supersmooth surface defects

Gesa, 解格飒 Xie; Hongjun, 王红军 Wang; Dasen, 王大森 Wang; Ailing, 田爱玲 Tian; Bingcai, 刘丙才 Liu; Xueliang, 朱学亮 Zhu; Weiguo, 刘卫国 Liu

doi:10.3788/irla201948.1113003

Cited by 1 publication

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“…Chemical treatment is the most common and effective method in the process of improving the resistance of fused quartz elements to laser damage [1][2][3][4]. Chemical treatment can greatly improve the surface service performance, but it also exposes sub-surface processing quality significantly and influences the surface accuracy of elements.…”

Section: Introductionmentioning

confidence: 99%

The influence of chemical etching on the surface quality of phase components

Yuan,

Zhong,

Liu

et al. 2023

J. Phys.: Conf. Ser.

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Large-aperture fused silica phase optical components such as continuous phase plate (CPP) are widely used in large-scale laser devices to achieve beam homogenization and improve beam quality. However, under the action of high-energy lasers, their lower damage threshold seriously restricts their service life and increases cost of using. Compared with other fused silica components, chemical processing technology with hydrofluoric acid solution (HF) is lacking in the processing of phase components because the residual root mean square value (RMS) of phase elements is very high, and it can not guarantee this. Therefore, it is necessary to carry out research on the influence of chemical treatment on phase components. In this paper, we improved the chemical treatment process to achieve the change of residual RMS value not more than 3 nm, and improved the ability of resisting laser damage that the damage threshold of 29J/cm2 was obtained under the test conditions 351nm@3ns. Finally, we successfully mastered the chemical control process of phase components and applied it to the CPPs as other fused quartz materials engineering production process.

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Section: Introductionmentioning

confidence: 99%