Study on Fusion Mechanisms for Sensitivity Improvement and Measurable Pressure Limit Extension of Pirani Vacuum Gauges With Multi Heat Sinks

Lai, Junhua; Kong, Yanmei; Jiao, Binbin; Ye, Yuxin; Yun, Shichang; Liu, Ruiwen; Ye, Mao; Zhang, Guohe

doi:10.1109/jmems.2019.2954155

Cited by 16 publications

(6 citation statements)

References 25 publications

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“…The comparison of combined MEMS thermal vacuum sensor with previous works is shown in table 2. In this table, the sensitive pressure range is defined as 10lg(p h /p l ) [16], and the larger the sensitive pressure range is, the wider the pressure range is. It is clearly that our combined MEMS thermal vacuum sensor can achieve a wider pressure range in a small size.…”

Section: Fabrication and Measurementmentioning

confidence: 99%

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A combined MEMS thermal vacuum sensor with a wide pressure range

Yuan,

Fu,

et al. 2023

J. Micromech. Microeng.

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MEMS thermal vacuum sensors have been widely applied in many academic and industry fields, and pressure range is a key performance of MEMS thermal vacuum sensors. To extend the pressure range, a combined MEMS thermal vacuum sensor that consists of two diode-type MEMS thermal vacuum sensors in series is proposed in this work. The two diode-type sensors are designed to have different areas of sensitive region and distances between sensitive region and heat sink, and their responses to the pressure are from 3.0 × 10−3 to 3 × 104 Pa and from 1.7 × 10−2 to 4.4 × 105 Pa, respectively. By series-connecting them, the combined sensor achieves a pressure range of 1.3 × 10−3 to 6.9 × 105 Pa without any additional control circuit. In addition, it possesses a relatively small size of 400 × 300 μm2. These indicate that the combined MEMS thermal vacuum sensor has the characteristics of wide pressure range, high sensitivity and small size.

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Section: Fabrication and Measurementmentioning

confidence: 99%

“…Simon et al incorporated two sensors with pressure ranges of 10 −3 ∼ 10 2 Pa and 10 2 ∼ 10 5 Pa in a single package [15]. Lai et al and Li et al performed similar works [16,17]. These works make a great contribution for a wide pressure range.…”

Section: Introductionmentioning

confidence: 99%

A combined MEMS thermal vacuum sensor with a wide pressure range

Yuan,

Fu,

et al. 2023

J. Micromech. Microeng.

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“…For a thermistor-based MEMS Pirani vacuum sensor, the heater is also a thermistor, the resistance of which is a function of its temperature, while the change in temperature is closely related to the air pressure [60][61][62]. When air pressure varies, heat loss through the air is changed, which, as a result, leads to temperature variation of the thermistor, accordingly, resistance of the thermistor is also changed.…”

Section: Thermistor-based Pirani Sensorsmentioning

confidence: 99%

Overview of the MEMS Pirani Sensors

Zhou

Shi

et al. 2022

Micromachines

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Vacuum equipment has a wide range of applications, and vacuum monitoring in such equipment is necessary in order to meet practical applications. Pirani sensors work by using the effect of air density on the heat conduction of the gas to cause temperature changes in sensitive structures, thus detecting the pressure in the surrounding environment and thus vacuum monitoring. In past decades, MEMS Pirani sensors have received considerable attention and practical applications because of their advances in simple structures, long service life, wide measurement range and high sensitivity. This review systematically summarizes and compares different types of MEMS Pirani sensors. The configuration, material, mechanism, and performance of different types of MEMS Pirani sensors are discussed, including the ones based on thermistors, thermocouples, diodes and surface acoustic wave. Further, the development status of novel Pirani sensors based on functional materials such as nanoporous materials, carbon nanotubes and graphene are investigated, and the possible future development directions for MEMS Pirani sensors are discussed. This review is with the purpose to focus on a generalized knowledge of MEMS Pirani sensors, thus inspiring the investigations on their practical applications.

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“…Since its invention, the quest for wider dynamic range, power efficiency, and improved sensitivity has been active [8][9][10][11][12][13][14][15]. Different approaches based on structural and dimensional optimizations were proposed for improving the gauge performance [9].…”

Section: Introductionmentioning

confidence: 99%

Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range

Garg,

Arya,

Kumar

et al. 2024

J. Micromech. Microeng.

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An electrostatically actuated all-metal MEMS Pirani gauge with a tunable dynamic range is proposed. Contrary to the conventional fixed gap Pirani gauges, an electrostatic mechanism is employed to tune the gaseous conduction gap. Due to the electrostatic force between the heating element and heat sink, this tuning results in shifting the transition pressure to a higher pressure. As a result, the operating range of the Pirani gauge can be tuned depending on the magnitude of the actuation voltage. Theoretical estimation of the transition pressure corresponding to different gaseous conduction gaps is also presented. Depending on the available margin of gap tuning, the electromechanical and electrothermal analyses are carried out in COMSOL Multiphysics. The analytical approach is validated by experimentally characterizing the fabricated device. The experimentally tested device with the proposed actuation mechanism shows an 11.2 dB increase in dynamic range in comparison to the conventional design. In a CMOS-compatible fabrication process flow, the proposed gauge can be used to monitor vacuum from 40 Pa to 5×10^5 Pa with the electrostatic actuation.

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Study on Fusion Mechanisms for Sensitivity Improvement and Measurable Pressure Limit Extension of Pirani Vacuum Gauges With Multi Heat Sinks

Cited by 16 publications

References 25 publications

A combined MEMS thermal vacuum sensor with a wide pressure range

A combined MEMS thermal vacuum sensor with a wide pressure range

Overview of the MEMS Pirani Sensors

Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range

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