In recent years, ultraprecision micromachining technology draws wide attention. In particular, multi-axis control ultraprecision machine tools are playing an important role in producing complicated microparts made of a variety of materials. In addition, CAM software is also an essential element to control these machine tools. The paper deals not only with the current state of multi-axis control ultraprecision machine tools but also with the manufacture of two workpieces consisting of complicated shapes by means of micromilling.