Study on MEMS Thermal Microactuators with Pedestal-Type Beam Shape and Au Electroplating

Ochiai, Kuniyuki; Osada, Takahiro; Muro, Hideo

doi:10.1541/ieejsmas.133.100

Cited by 3 publications

(1 citation statement)

References 6 publications

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“…Li-Nuan Tsai et al [15] prepared nickel and diamond nanocomposites for electrothermal microactuators, and the nanocomposites can save about 73% of power compared to microactuators made of pure nickel. K. Ochiai et al [16] obtained larger displacements with a trapezoidal gold-plated MEMS thermal microactuator prepared using the SOI-MUMPS technique. Nguyen et al [17] performed platinum coating on a silicon electrothermal V-shaped actuator, and, at the same displacement, the driving voltage was reduced by 40% for specimens with platinum coating compared to specimens without coating.…”

Section: Introductionmentioning

confidence: 99%

Effect of Metal Coating on Displacement of the Silicon Electrothermal V-Shaped Actuator

et al. 2023

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Electrothermal actuation is widely employed in MEMS systems, and the electrothermal V-shaped actuator (referred to as EVA) has garnered attention due to its stable output force. However, current EVAs in MEMS face the challenge of limited driving displacement. To investigate the impact of metal coating on the driving displacement of silicon EVAs, a mechanical model is established, and a formula for calculating the maximum displacement is derived. The theoretical analysis results are compared between cases with and without metal coating. To validate the formula’s accuracy, the COMSOL simulation platform is utilized, employing the finite element method to model and simulate actuators with various metal coatings. The analysis demonstrates that the calculated results have a maximum error of 10% compared to the simulation results. The metal coating enhances the displacement of silicon EVAs to different degrees, with a more pronounced effect observed for metal coatings with lower resistivity. Notably, a copper metal coating doubles the displacement of silicon EVAs at a voltage of 4 V. In other words, under the same displacement, a silicon EVA with a metal coating requires a lower input voltage compared to the group without a metal coating, resulting in a significant voltage reduction of 33.75%.

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Section: Introductionmentioning

confidence: 99%

Effect of Metal Coating on Displacement of the Silicon Electrothermal V-Shaped Actuator

et al. 2023

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Interface shape identification of three-dimensional thermo-elastic composite structures consisting of dissimilar materials

Shimoda

Otani

Shi

2015

Transactions of the JSME (In Japanese)

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Shape design of composite structures composed of dissimilar materials moves more into the field of vision for designers. In this paper we propose a shape identification method for the interface and/or outside shape design of composite structures consisting of dissimilar thermo-elastic materials under a thermal loading condition. We aim at controlling thermal displacements at a prescribed boundary to target values. The square displacement error norm is minimized by varying the interface and the outside shapes as the design boundary. The shape gradient function derived using the material derivative method is applied to the H 1 gradient method. With this method, the optimal interface and outside shape with smoothness can be determined without any shape parameterization. The numerical results of the given examples show that the thermal displacements of solid structures composed of dissimilar materials can be well controlled using the proposed shape identification method, which would be helpful for designing solid structures composed of dissimilar materials.

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Optical Microscanner Using a Pair of Thermal Microactuators with Alternating Drive

Saito

Muro

2014

IEEJ Trans. SM

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Study on MEMS Thermal Microactuators with Pedestal-Type Beam Shape and Au Electroplating

Cited by 3 publications

References 6 publications

Effect of Metal Coating on Displacement of the Silicon Electrothermal V-Shaped Actuator

Effect of Metal Coating on Displacement of the Silicon Electrothermal V-Shaped Actuator

Interface shape identification of three-dimensional thermo-elastic composite structures consisting of dissimilar materials

Optical Microscanner Using a Pair of Thermal Microactuators with Alternating Drive

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