Study on real-time z-scanning of multiple-pulse laser ablation of metal applied in roll-printed electronics

Hoang, Le Phuong; Nguyen, Phuong Thao; Cúc, Nguyễn Thị Kim; Vu, Toan Thang; Cao, Binh Xuan

doi:10.1364/ome.416657

Cited by 5 publications

(6 citation statements)

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“…Then the sections will be refocused by mechanical compensation [ 15 , 16 ]. However, it is constrained by the speed of both feedback and translation stage, which hampers the feasibility for practical application [ 17 , 18 ]. Another strategy is to extend DOF of the system.…”

Section: Introductionmentioning

confidence: 99%

Laser axial scanning microdissection for high-efficiency dissection from uneven biological samples

Yang,

Ji,

Luo

et al. 2024

Biomed. Opt. Express

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Fast and efficient separation of target samples is crucial for the application of laser-assisted microdissection in the molecular biology research field. Herein, we developed a laser axial scanning microdissection (LASM) system with an 8.6 times extended depth of focus by using an electrically tunable lens. We showed that the ablation quality of silicon wafers at different depths became homogenous after using our system. More importantly, for those uneven biological tissue sections within a height difference of no more than 19.2 µm, we have demonstrated that the targets with a size of microns at arbitrary positions can be dissected efficiently without additional focusing and dissection operations. Besides, dissection experiments on various biological samples with different embedding methods, which were widely adopted in biological experiments, also have shown the feasibility of our system.

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Section: Introductionmentioning

confidence: 99%

Laser axial scanning microdissection for high-efficiency dissection from uneven biological samples

Yang,

Ji,

Luo

et al. 2024

Biomed. Opt. Express

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“…In this way, the non-flat surface is always maintained within the range of the narrow DOF. However, the described method is both time-and laborintensive, as it involves complex operating procedures and coordination of multiple instruments 3 . Moreover, the exsitu surface characterization and the axial re-alignment always result in repositioning errors and extended processing times 4 .…”

Section: Introductionmentioning

confidence: 99%

“…The focus error or defocusing (z s À z f ) is determined from the position (triangulation) 5 , intensity 13 , beam size 14,15 , astigmatism 16,17 of a reflected probing beam, or chromatic aberrations 10,11 , nonlinear harmonics 18 of process-generated light. Other back-reflected detection methods also adopt differential optical paths 19,20 , interferometry 21,22 , diffractive beam samplers 23 , spatial light modulators 24 , dynamic mechanical scanning 3,25,26 , digital image correlation 12 , or commercial displacement sensors 7,9 . However, most optical metrology with automatic focus alignment still requires the mechanical motion of a z stage attached to the sample 6,14,18,19,22 or the focusing lens 3,8,10,[23][24][25] as the second 'movement' module in its feedback loop.…”

Section: Introductionmentioning

confidence: 99%

“…Other back-reflected detection methods also adopt differential optical paths 19,20 , interferometry 21,22 , diffractive beam samplers 23 , spatial light modulators 24 , dynamic mechanical scanning 3,25,26 , digital image correlation 12 , or commercial displacement sensors 7,9 . However, most optical metrology with automatic focus alignment still requires the mechanical motion of a z stage attached to the sample 6,14,18,19,22 or the focusing lens 3,8,10,[23][24][25] as the second 'movement' module in its feedback loop. Even with the advance of the fast mechanical stages and scanning galvomirrors, adjusting z position can be up to three orders of magnitude slower than the lateral speed of adjusting x and y 27 due to mechanical acceleration/deceleration.…”

Section: Introductionmentioning

confidence: 99%

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Single-lens dynamic $$z$$-scanning for simultaneous in situ position detection and laser processing focus control

Du,

Florian,

Arnold

2023

Light Sci Appl

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Existing auto-focusing methods in laser processing typically include two independent modules, one for surface detection and another for $$z$$ z -axis adjustment. The latter is mostly implemented by mechanical $$z$$ z stage motion, which is up to three orders of magnitude slower than the lateral processing speed. To alleviate this processing bottleneck, we developed a single-lens approach, using only one high-speed $$z$$ z -scanning optical element, to accomplish both in situ surface detection and focus control quasi-simultaneously in a dual-beam setup. The probing beam scans the surface along the $$z$$ z -axis continuously, and its reflection is detected by a set of confocal optics. Based on the temporal response of the detected signal, we have developed and experimentally demonstrated a dynamic surface detection method at 140–350 kHz, with a controlled detection range, high repeatability, and minimum linearity error of 1.10%. Sequentially, by synchronizing at a corresponding oscillation phase of the $$z$$ z -scanning lens, the fabrication beam is directed to the probed $$z$$ z position for precise focus alignment. Overall, our approach provides instantaneous surface tracking by collecting position information and executing focal control both at 140–350 kHz, which significantly accelerates the axial alignment process and offers great potential for enhancing the speed of advanced manufacturing processes in three-dimensional space.

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“…Li et al [ 24 ] examined the difference in density between the light guide point distribution of LGP images, with different sizes, shapes, and brightness levels of LGP defects, and limitations of a small number of defective samples. Hoang et al [ 25 ] investigated interactions between a metal surface and multiple pulses to achieve optimal focusing conditions during ultrashort laser ablation. Li and Li [ 26 ] used automatic vision-based defect detection on an LGP based on the low contrast between the defect and the background, an uneven brightness, and a complex gradient texture.…”

Section: Introductionmentioning

confidence: 99%

Analysis of Melt Front Behavior of a Light Guiding Plate during the Filling Phase of Micro-Injection Molding

et al. 2022

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When the size of a liquid crystal display (LCD) increases, the light guiding plate (LGP) as the main part of the LCD must adopt a wedge-shaped plate to reduce its weight (the thickness of the LGP decreases because of this) and guide the light to the LCD screen. Micro-injection molding (MIM) is commonly used to manufacture LGPs. During the filling phase of MIM, the entire entering polymer melt front of the LGP should reach the end of the mold cavity at the same time. In this way, there will be no shrinkage or warpage of the LGP in its subsequent application, but it is difficult for the wedge-shaped LGP to meet these requirements. Therefore, the authors hoped to investigate MIM process parameters to change this situation. Otherwise, the LGP is easily deformed during the manufacturing process. Flow characteristics of LGPs were investigated during the filling phase of MIM in this study. Experimental and 3D numerical simulations were used to analyze the hysteresis, i.e., the advance of the polymer melt front of the LGP in MIM. Study results showed that a low injection speed caused a hysteresis effect of the plastic melt front, the solution was to increase the injection speed to improve the situation and an injection speed of 10 cm/s could achieve uniformity of the melt front in MIM. The research results showed that the filling situation of the LGP of MIM in the experiment was very close to that of the 3D numerical simulation.

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Study on real-time z-scanning of multiple-pulse laser ablation of metal applied in roll-printed electronics

Cited by 5 publications

References 50 publications

Laser axial scanning microdissection for high-efficiency dissection from uneven biological samples

Laser axial scanning microdissection for high-efficiency dissection from uneven biological samples

Single-lens dynamic $$z$$-scanning for simultaneous in situ position detection and laser processing focus control

Analysis of Melt Front Behavior of a Light Guiding Plate during the Filling Phase of Micro-Injection Molding

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