This study reveals the interfacial properties of multicomponent plasma with four aspects, including cleaning, etching, functionalization, and polymerization. Particles formed by plasma ionization collide to form volatile groups, which can interact with the surface to form volatile substances that clean the surface. The multicomponent plasma etching effect on the surface is significant, and O 2 and N 2 may interact to improve oxidation capacity. Inert gas argon (Ar) can be combined with reactive gases O 2 , N 2 , and NH 3 to introduce hydroxyl and amine groups and other active groups to change the surface's chemical structure. When a multicomponent plasma polymerizes, a film forms on the surface, changing the chemical composition. The cross-linking of gases has a positive effect on the properties of the deposited layer as well. The treatment of various fiber materials, nanoparticles, polymer films, and matrix materials with multicomponent plasma is summarized. The multicomponent plasma significantly improves surface wettability and roughness, and oxygen species aid in the etching of nanomaterials, which improves interface properties. The gas types determine the groups introduced to the surface and the surface attachment site.