Study on the Control of Micro-Environmental Parameters in Long Distance Laser Interferometry

Abstract

Fluctuation in environmental parameters has become an important factor affecting the performance of ultra precision measurement. Aiming at the long-distance and high-speed laser interferometer measurement system, a method combining structure design and closed-loop control is proposed to reduce the measurement error caused by environmental parameters. The uniform pressure structure is designed, and the control system of micro environmental parameters is established. The simulation and experimental research on the uniformity of temperature and pressure on the optical path measured by laser interferometer are carried out. The simulation and experimental results show that this method can achieve temperature uniformity and stability above 0.01°C and pressure uniformity and stability above 1Pa, and can be widely used in micro environment parameter control of long-distance ultra precision measurement.