Study on the Corrosion Characteristics of Sputtered Barrier-Free Cu(MoN) Copper Seed Layers

Wang, Chun‐Chieh; Huang, Chia-Hung; Chu, Chien Wei; Liu, Wei‐Ren; Hwang, Weng-Sing; Chiu, Sung-Mao; Wei, Chia-Min

doi:10.1166/nnl.2015.1947

Nanosci Nanotechnol Lett

2015

DOI: 10.1166/nnl.2015.1947

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Study on the Corrosion Characteristics of Sputtered Barrier-Free Cu(MoN) Copper Seed Layers

Chun‐Chieh Wang¹,

Chia-Hung Huang²,

Chien Wei Chu³

et al.

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Study on the Corrosion Characteristics of Sputtered Barrier-Free Cu(MoN) Copper Seed Layers

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