In this work we studied the initial microstructure and microstructural evolution of eutectic Au-Sn solder bumps on Cu/electroless Ni/Au. The solder bumps were 150-160 µm in diameter and 45-50 µm tall, reflowed on Cu/electroless Ni/Au, and then aged at 200 o C for up to 365 days. In addition, Au-Ni-Sn-alloys were made and analyzed to help identify the phases that appear at the interface during aging.The detailed interfacial microstructure was observed using TEM. The results show that the introduction of Au from the substrate produces large islands of ζ-phase in the bulk microstructure during reflow. Two Au-Ni-Sn compounds are formed at the solder/substrate interface and grow slowly during aging. The maximum solubility of Ni in the ζ-phase was measured to be about 1 at.% at 200°C, while Ni in the δ-phase is more than 20 at.%. The electroless Ni layer is made of several sublayers with slightly different compositions and microstructures. There is, in addition, an amorphous interaction layer at the solder/electroless Ni interface.