Study on the formation defect of nano imprinted optical waveguide devices and nano‐indentation detection

Weng, Yung-Jin; Yang, Sen‐Yeu; Wong, Jhih-Wei

doi:10.1002/pat.1164

Cited by 8 publications

(4 citation statements)

References 5 publications

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“…Although small to medium size BLG can be produced by precision injection molding method, it is not suitable for producing large-sized ones due to the large flow resistance and induced residual stress [3,4]. While UV resin imprint process is limited for the problems of the control of the residual layer thickness and the bubble defect problem [5,6]. Among embossing processes, precision rollers embossing process provides an enabling solution for producing large-sized plastic plates with patterned microstructures.…”

Section: Introductionmentioning

confidence: 99%

A Framework of a Continuous Injection Direct Rolling Process for Precision Manufacturing Plastic Plates with Patterned Microstructures

Kong

Cheung

et al. 2014

KEM

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This paper presents an integrated roller embossing process named Continuous Injection Direct Rolling (CIDR) process. The CIDR process is similar to Continue Casting Direct Rolling (CCDR) process for metal material. The process consists of Plastic Injection Module, Injection Nozzle, Precision Rolling Module, and Automatic Coiling Module. In the proposed CIDR process, the plastic plate with microstructured pattern is produced by the integrated injection and rolling process, which is different from the current rolling or plastic injection process. Some key technologies including injection nozzle design, roller design, roller coupling, and ultra-precision machining of rollers, are presented. An on-machine measurement method is also proposed and presented to avoid the incontinence and errors caused by disassembling the roller workpiece for off-line measurement. The results of the pilot study are also discussed. The research work provides an enabling solution for precision manufacturing plastic plate and film with microstructured patterns.

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Section: Introductionmentioning

confidence: 99%

A Framework of a Continuous Injection Direct Rolling Process for Precision Manufacturing Plastic Plates with Patterned Microstructures

Kong

Cheung

et al. 2014

KEM

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“…It is difficult to manufacture surface-structured large thin plates through injection molding, due to the large flow resistance and induced residual stress [5,6]. UV resin imprint for fabrication of high quality microstructures is limited by some issues such as the control of the residual layer thickness and the bubble defect problem [7,8]. The simple and inexpensive hot embossing process provides a better replication than other methods [4].…”

Section: Introductionmentioning

confidence: 99%

A high-brightness light guide plate with high precise double-sided microstructures fabricated using the fixed boundary hot embossing technique

Yang

2013

J. Micromech. Microeng.

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In recent years, microstructures have been widely applied in many key optical elements and bio-elements. The effective and efficient fabrication of optical elements and bio-elements with superior performance has become an essential challenge. This requires very accurate shape replication of microstructures. The plate-to-plate hot embossing process is the most likely method of mass production for the replication of double-sided micro/nano structures with high precision and quality. However, the traditional uniform heating hot embossing process as the free boundary of open die forging leads to variation. In this research, three techniques are implemented; the conventional uniform heating technique, the non-uniform pressure compensating technique and the fixed boundary hot embossing technique. The temperature distribution of the hot-plates of the fixed boundary hot embossing technique are designed to keep the temperature in the center part higher than the outer part on the surface of the substrates. This phenomenon changes free boundary in conventional uniform heating into fixed boundary. The results demonstrate the potential of the fixed boundary hot embossing technique for the fabrication of large-area high brightness LGPs with double-sided microstructures. The results are also helpful for enhancing the performance of optical elements and bio-elements fabricated using the fixed boundary hot embossing technique.

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“…Aside from proceeding to the imprint process through the pressurized panel structure as stated above, there is another imprinting technology being developed in recent years, it is the pressurizing method through high pressured gas to provide the mold with an imprinting force 12–15. Although it can minimize the imprinting error caused by the deforming mold that uses the pressurizing method through high pressured gas, but it is required to put the parts into one high pressure cavity during the imprinting processes, it is difficult to simultaneously observe.…”

Section: Introductionmentioning

confidence: 99%

Applying magnetic soft mold imprint technology with ultraviolet light‐emitting‐diode array on the fabrication of microlens arrays

Weng

Yang

2011

Polymers for Advanced Techs

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This study proposed a novel technology, which uses exposed technology with ultraviolet light‐emitting‐diode (UV‐LED) arrays and the polydimethylsiloxane (PDMS) magnetic flexible soft mold imprint technology, to develop exposed equipments with UV‐LED arrays. This study used magnetic soft mold imprint technology to replicate the structure of microlens, providing a more effective alternative for imprint technology and application. The measurement results showed that PDMS with magnetic iron powder can precisely cast mold to replicate the structures of microlens. Electromagnetic plates were used to control even imprinting with magnetic force, in order to fill the mold of micro‐structure of the photo‐resist. Magnetic iron powder was added to PDMS to produce composite material, which can effectively avoid the transformation of pure PDMS during soft mold imprinting, and increase mechanical strength. Magnetic PDMS soft mold is easy to make, and the casting time is short, so that costs can be effectively reduced. Also with advantages of less free energy on its surface, and unlikely to adhere to the photo‐resist during imprinting, it can be combined with electromagnetic plates evenly to control the magnetic soft mold. This imprinting technology is a big advantage to the production process of micro‐structures during imprinting. Copyright © 2009 John Wiley & Sons, Ltd.

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Study on the formation defect of nano imprinted optical waveguide devices and nano‐indentation detection

Cited by 8 publications

References 5 publications

A Framework of a Continuous Injection Direct Rolling Process for Precision Manufacturing Plastic Plates with Patterned Microstructures

A Framework of a Continuous Injection Direct Rolling Process for Precision Manufacturing Plastic Plates with Patterned Microstructures

A high-brightness light guide plate with high precise double-sided microstructures fabricated using the fixed boundary hot embossing technique

Applying magnetic soft mold imprint technology with ultraviolet light‐emitting‐diode array on the fabrication of microlens arrays

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