2023
DOI: 10.3390/cryst13121611
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Study on the Influence of KOH Wet Treatment on Red μLEDs

Shuhan Zhang,
Qian Fan,
Xianfeng Ni
et al.

Abstract: InGaN-based red micro-light-emitting diodes (µLEDs) of different sizes were prepared in this work. The red GaN epilayers were grown on 4-inch sapphire substrates through metal-organic chemical vapor deposition (MOCVD). Etching, sidewall treatment, and p- and n-contact deposition were involved in the fabrication process. Initially, the etching process would cause undesirable damage to the GaN sidewalls, which leads to an increase in leakage current. Hence, we employed KOH wet treatment to rectify the defects on… Show more

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