Study on the ions’ behavior in an electron cyclotron resonance plasma

Liu, Minghai; Hu, Xiwei; Wu, Han-Ming

doi:10.1063/1.365382

Journal of Applied Physics

1997

DOI: 10.1063/1.365382

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Study on the ions’ behavior in an electron cyclotron resonance plasma

Minghai Liu¹,

Xiwei Hu²,

Han-Ming Wu³

Abstract: The energy, velocity, angle distribution of ions in magnetoactive electron cyclotron resonance plasma have been studied with a two-dimension hybrid mode. The dependence of these distribution functions versus position and pressure are discussed. Our simulation results are in good agreement with many experimental measurements.

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Cited by 10 publications

References 15 publications

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Two-dimensional simulation of an electron cyclotron resonance plasma source with self-consistent power deposition

Liu¹,

Hu²,

Wu³

et al. 2000

Surface and Coatings Technology

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Using a refined two-dimensional hybrid-model with self-consistent microwave absorption, we have investigated the change of plasma parameters such as plasma density and ionization rate with the operating conditions. The dependence of the ion current density and ion energy and angle distribution function at the substrate surface vs. the radial position, pressure and microwave power were discussed. Results of our simulation can be compared qualitatively with many experimental measurements. ᮊ

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Two-dimensional simulation of an electron cyclotron resonance plasma source with self-consistent power deposition

Liu¹,

Hu²,

Wu³

et al. 2000

Surface and Coatings Technology

Self Cite

View full text Add to dashboard Cite

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Production of planar-type overdense plasma with resonant excitation of surface plasmon polaritons

Chen

Liu

Liang

et al. 2009

Journal of Applied Physics

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The present study presents a plasma source, capable of generating overdense plasma below the whole quartz plate while exciting surface plasmon polaritons (SPPs) by means of a subwavelength diffraction grating. The wavelength of surface wave, calculated on either the discharge image or the simulated electric field distribution graph, is about 5.7 cm, which approximates the theoretical value by a calculation of the SPP dispersion equation in overdense plasma. The operation mechanism of plasma heating is attributed to the resonant excitation of SPPs and its dissipation in plasma.

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Monte Carlo simulations of argon ion transport in the downstream region of electron cyclotron resonance plasmas

Zhong

et al. 1998

Journal of Applied Physics

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A Monte Carlo method to simulate the plasma characteristics of an electron cyclotron resonance (ECR) microwave discharge system is presented. We use the method to predict the ion behavior in the downstream region of an ECR argon plasma. The pressure and space dependences of the plasma potential, the effects of gas pressure on the ion velocity and angle distribution and the evolution of distributions are examined and discussed in detail. Our results of the simulation show that the ion parallel velocity distribution appears to be bimodal and is strongly dependent on the gas pressure, whereas the ion perpendicular velocity distribution is mainly determined by the applied magnetic field, and the ion beam tends to be parallel to the magnetic field.

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Study on the ions’ behavior in an electron cyclotron resonance plasma

Cited by 10 publications

References 15 publications

Two-dimensional simulation of an electron cyclotron resonance plasma source with self-consistent power deposition

Two-dimensional simulation of an electron cyclotron resonance plasma source with self-consistent power deposition

Production of planar-type overdense plasma with resonant excitation of surface plasmon polaritons

Monte Carlo simulations of argon ion transport in the downstream region of electron cyclotron resonance plasmas

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