In recent years, the rapid technology development in industry sector, especially in aviation industry has been increasing. So that we need more capabilities in the micro-scale manufacturing process, especially micro-milling process which can produce good surface roughness and high complexity parts. In this study, the effect of machining parameters to the surface roughness investigated by using Inconel 718 material with cutting tool diameter 1 mm, carbide material with coating TiAlN. The machining process was performed in low speed machining category. There are three variations of spindle speed (3.000, 7.000, 10.000 RPM) and also feed rate (0.5, 1, 2 mm/s) with constant depth of cut 10 μm. The relationship between machining parameters and surface roughness was obtained. The higher the feed rate, the higher the surface roughness produced. On the other hand, the higher the spindle speed the smaller the surface roughness. It also found that the machining process with low spindle speed, below 10.000 RPM, successfully carried out on hard-to-cut material, Inconel 718, that will be increasing the flexibility of machining parameters.