2018
DOI: 10.1016/j.comptc.2018.07.009
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Study on the reaction of trimethylaluminum dimer and ammonia based on density functional theory

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Cited by 5 publications
(2 citation statements)
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“…To avoid the extensive sampling of the conformational space originating from the i Bu groups of triisobutylaluminium (TIBA), TIBA was modeled by TEA though the steric hindrance of the isobutyl groups significantly hampers aggregation . Based on previously reported speciation of trimethylaluminum (TMA), , one monomer and two types of dimer were optimized. Monomer Al 1 has a trigonal plane geometry, dimers Al 2 cis and Al 2 trans display, respectively, cis - or trans -periplanar alkyl bridges (Scheme ).…”
Section: Resultsmentioning
confidence: 99%
“…To avoid the extensive sampling of the conformational space originating from the i Bu groups of triisobutylaluminium (TIBA), TIBA was modeled by TEA though the steric hindrance of the isobutyl groups significantly hampers aggregation . Based on previously reported speciation of trimethylaluminum (TMA), , one monomer and two types of dimer were optimized. Monomer Al 1 has a trigonal plane geometry, dimers Al 2 cis and Al 2 trans display, respectively, cis - or trans -periplanar alkyl bridges (Scheme ).…”
Section: Resultsmentioning
confidence: 99%
“…This creates a pathway for learning precise information about kinetic parameters and chemical reactions. 9,10 In general, film growth in MOCVD is considered as having two competing reaction routes, the intricate adduct formation pathway and the straightforward thermal decomposition pathway. The reaction route is thought to be closely related to the geometric structure of the reaction chamber, operating conditions, and degree of source gas mixing.…”
Section: Introductionmentioning
confidence: 99%