Study on the Variation of Surface Morphology and Residual Stress Under Various Thermal Annealing Conditions with Bulk GaN Substrates Grown by HVPE

Lee, Hee Ae; Park, Jae Hwa; Lee, Joohyung; Lee, Jun Young; Kang, Hyo Sang; Lee, Seong Kuk; Park, Won Il; Yi, Sung Chul

doi:10.1007/s13391-020-00252-x

Electron. Mater. Lett.

2020

DOI: 10.1007/s13391-020-00252-x

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Study on the Variation of Surface Morphology and Residual Stress Under Various Thermal Annealing Conditions with Bulk GaN Substrates Grown by HVPE

Hee Ae Lee

Jae Hwa Park²,

Joohyung Lee

et al.

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Cited by 3 publications

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Evolution of Microcracks in Epitaxial CeO2 Thin Films on YSZ-Buffered Si

Jung¹,

Choi²,

Lee³

et al. 2023

Electron. Mater. Lett.

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Study on the Variation of Surface Morphology and Residual Stress Under Various Thermal Annealing Conditions with Bulk GaN Substrates Grown by HVPE

Cited by 3 publications

References 27 publications

Evolution of Microcracks in Epitaxial CeO2 Thin Films on YSZ-Buffered Si

Evolution of Microcracks in Epitaxial CeO2 Thin Films on YSZ-Buffered Si

Effect of annealing temperature and ambience on roughened GaN substrate

Homogeneous and well-aligned GaN nanowire arrays via a modified HVPE process and their cathodoluminescence properties

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