Study on Thickness Mode of Piezoelectric Ceramic Disk With Discrete Series Electrode Structure

Bi, Hong-zhen; Zhang, Han; Wangi, Mu-guang

doi:10.1109/spawda.2019.8681799

Cited by 1 publication

(1 citation statement)

References 5 publications

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“…In recent years, piezoelectric bulk acoustic wave devices have attracted much attention, which has been widely used for resonators, sensors, and transducers [1][2][3][4][5][6]. The excitation modes for piezoelectric bulk acoustic waves are divided into thickness field excitation (TFE) and lateral field excitation (LFE).…”

Section: Introductionmentioning

confidence: 99%

Effects of Polarity Inversion Layer on Performances of Lateral-Field-Excitation Piezoelectric Sensors Based on Lithium Niobate Single Crystal

et al. 2021

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In this work, lateral-field-excitation (LFE) piezoelectric sensors based on polarity inversion layer are designed and fabricated, then frequency stabilities and sensitivities on electric property changes of liquids are tested. Because the polarity inversion layer can suppress the spurious modes, the stabilities of the LFE devices with a polarity inversion layer are obviously better than that of LFE devices with no polarity inversion layer. On the changes of liquid conductivity and permittivity, the sensitivities of the LFE devices with a polarity inversion layer are 2.4 times and 2.1 times higher than that of LFE devices with no polarity inversion layer, respectively. The polarity inversion layer of the lithium niobate crystal plate can be realized conveniently by heat treatment, therefore, the technology of the polarity inversion layer can play an important role in improving the sensing performances of LFE sensors.

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