Study on UV-LIGA Technology Fabrication of Micro Gear Transmission Device

Zhang, Li Yong; Wang, Chang Lu; Liu, Zhong Ming; Ming, Lü; Meng, Ling Xian; Zhang, Yuan Guo; Zhang, He Ping

doi:10.4028/www.scientific.net/amm.86.273

Cited by 4 publications

(2 citation statements)

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“…[18]. Many scholars have studied the fabrication of micro-gear structures using the micro electroforming technology [19][20][21][22]. One of main engineering limitations is nonuniform thickness [19].…”

Section: Introductionmentioning

confidence: 99%

Improving the Thickness Uniformity of Micro Gear by Multi-Step, Self-Aligned Lithography and Electroforming

et al. 2023

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The thickness nonuniformity of an electroformed layer is a bottleneck problem for electroformed micro metal devices. In this paper, a new fabrication method is proposed to improve the thickness uniformity of micro gear, which is the key element of various microdevices. The effect of the thickness of the photoresist on the uniformity was studied by simulation analysis, which showed that as the thickness of the photoresist increased, the thickness nonuniformity of the electroformed gear should decrease due to the reduced edge effect of the current density. Differently from the traditional method performed by one-step front lithography and electroforming, multi-step, self-aligned lithography and electroforming are used to fabricate micro gear structures in proposed method, which intermittently keeps the thickness of photoresist from decreasing during processes of alternate lithography and electroforming. The experimental results show that the thickness uniformity of micro gear fabricated by the proposed method was improved by 45.7% compared with that fabricated by the traditional method. Meanwhile, the roughness of the middle region of the gear structure was reduced by 17.4%.

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Section: Introductionmentioning

confidence: 99%

Improving the Thickness Uniformity of Micro Gear by Multi-Step, Self-Aligned Lithography and Electroforming

et al. 2023

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“…Pure nickel is used widely in the preparation of various metal microstructures because of its high ductility, strength, and fatigue and corrosion resistances and superior magnetoelasticity [ 1 , 2 ]. Various types of pure-nickel microstructures have been used successfully in micromachines and microsystems, such as the microscopic coil springs of semiconductor devices [ 3 ], the microgear reducer of a microscopic transmission system [ 4 ], the microrotor of a microgyroscope [ 5 ], and the microcantilevers of hydrogen sensors [ 6 ]. Recently, the integral fabrication of a high-working-frequency terahertz rectangular waveguide cavity was reported, and this novel process depends on the manufacture of a pure-nickel sacrificial rectangular mandrel and its selective chemical dissolution [ 7 , 8 ].…”

Section: Introductionmentioning

confidence: 99%

Electrochemical Deposition of Pure-Nickel Microstructures with Controllable Size

Meng

2022

Micromachines

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Pure nickel microstructures have been widely used in MEMS and have great application potential as a sacrificial mandrel for fabricating terahertz micro-cavity components. The performance of MEMS and terahertz micro-cavity components can be significantly improved through the use of high-quality pure nickel microstructures. Up to now, microfabrication techniques, such as laser micromachining, wire electrical-discharge machining, and cold-spray additive manufacturing, have been used to machine various types of such microstructures. However, huge challenges are involved in using these micromachining techniques to fabricate pure-nickel microstructures with controllable size and good dimensional accuracy, surface roughness, and edge radius. In this paper, taking the example of a pure-nickel rectangular mandrel that corresponds to the size of the end face of a 1.7-THz rectangular waveguide cavity, the machining processes for the electrochemical deposition of pure-nickel microstructures with controllable size, high dimensional accuracy, and good surface roughness and edge radius are discussed systematically. This proposed method can be used to manufacture various types of high-quality pure-nickel microstructures.

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State-of-art review of past research on manufacturing of meso and micro cylindrical gears

Chaubey

Jain

2018

Precision Engineering

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Study on UV-LIGA Technology Fabrication of Micro Gear Transmission Device

Cited by 4 publications

References 0 publications

Improving the Thickness Uniformity of Micro Gear by Multi-Step, Self-Aligned Lithography and Electroforming

Improving the Thickness Uniformity of Micro Gear by Multi-Step, Self-Aligned Lithography and Electroforming

Electrochemical Deposition of Pure-Nickel Microstructures with Controllable Size

State-of-art review of past research on manufacturing of meso and micro cylindrical gears

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