Studying the efficacy of hydrogen plasma treatment for enabling the etching of thermally annealed ruthenium in chemical solutions

Le, Q.T.; Gül Arslan, E.; Rip, J.; De Coster, H.; Verdonck, P.; Radisic, D.; Schleicher, F.; Vaesen, I.; Conard, T.; Altamirano-Sanchez, E.

doi:10.1016/j.mne.2023.100208

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Studying the efficacy of hydrogen plasma treatment for enabling the etching of thermally annealed ruthenium in chemical solutions

Cited by 3 publications

References 23 publications

Solar-driven thermo-photocatalytic CO2 methanation over a structured RuO2:TiO2/SBA-15 nanocomposite at low temperature

Solar-driven thermo-photocatalytic CO2 methanation over a structured RuO2:TiO2/SBA-15 nanocomposite at low temperature

Selective removal of single-layer graphene over double-layer graphene on SiO2 by remote oxygen plasma irradiation

Process Development and Characterization of Ru-based UBM for In Bumps Integration for Quantum Computing Applications

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