SU-8-Based Structural Material for Microelectronic Processing Applications

Cho, Sung‐Jin; Kim, Nam‐Young

doi:10.1080/10426914.2013.792409

Cited by 12 publications

(8 citation statements)

References 26 publications

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“…In was concluded that integration of both rapid prototyping and rapid tooling techniques have been proved to be an efficient way of fabricating micro-featured hot embossing stamps with conformal cooling channels without the use of copper ducts [16]. In addition, the proposed method requires no expensive apparatus compared to methods such as photolithography [17], wire electrical discharge machining [18], focused ion beam [19], electrochemical micromachining [20], deep-reactive ion etching [21], micro machining [22], micro-electro discharge machining [23], laser micromachining [24], lithographie galvanoformung abformung [25], and silicon-based micromachining [26]. However, optimal designs of conformal cooling channels for reducing the cycle time of hot embossing have not been carried out.…”

Section: Resultsmentioning

confidence: 99%

Development of hot embossing stamps with conformal cooling channels for microreplication

Kuo

Chen

2016

Int J Adv Manuf Technol

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Hot embossing stamp fabricated from aluminumfilled epoxy resin can be employed for short-run productions. However, the cooling time is much longer compared to metallic stamps due to poorer thermal conductivity. Therefore, developing a hot embossing stamp with high cooling efficiency is an important issue. In this study, three different coolingchannel layouts were employed to fabricate hot embossing stamps using rapid prototyping and rapid tooling techniques. Effects of different hot embossing stamps on the cooling time during hot embossing molding were investigated. It was found that the reduction in cooling time about 92 % can be obtained when a hot embossing stamp with conformal cooling channels compared to the hot embossing stamp without cooling channels. The manufacturing cost reduction for a micro-featured hot embossing stamp with high cooling efficiency about 72 % can be obtained using the method proposed in this work.

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Section: Resultsmentioning

confidence: 99%

Development of hot embossing stamps with conformal cooling channels for microreplication

Kuo

Chen

2016

Int J Adv Manuf Technol

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“…For light propagation, polymer waveguiding structures were considered and, among all, SU-8 was chosen as main material. SU-8 is a versatile, epoxy-based, photosensitive polymer with low electrical conductivity and high optical transparency in the visible spectrum, and is widely used with various micro-electro-mechanical systems (MEMS) [ 21 , 22 ] and microelectronic applications [ 23 , 24 ]. The absorption of light in the ultraviolet (UV) spectrum brings to the possibility of fabricating thin and thick films with high aspect ratios by means of a single UV photolithographic step [ 25 ].…”

Section: Design and Working Principlementioning

confidence: 99%

On-Glass Integrated SU-8 Waveguide and Amorphous Silicon Photosensor for On-Chip Detection of Biomolecules: Feasibility Study on Hemoglobin Sensing

Buzzin

Asquini

Caputo

et al. 2021

Sensors

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An optoelectronic, integrated system-on-glass for on-chip detection of biomolecules is here presented. The system’s working principle is based on the interaction, detected by a hydrogenated amorphous silicon photosensor, between a monochromatic light travelling in a SU-8 polymer optical waveguide and the biological solution under analysis. Optical simulations of the waveguide coupling to the thin-film photodiode with a specific design were carried out. A prototype was fabricated and characterized showing waveguide optical losses of about 0.6 dB/cm, a photodiode shot noise current of about 2.5 fA/Hz and responsivity of 495 mA/W at 532 nm. An electro-optical coupling test was performed on the fabricated device to validate the system. As proof of concept, hemoglobin was studied as analyte for a demonstration scenario, involving optical simulations interpolated with experimental data. The calculated detection limit of the proposed system for hemoglobin concentration in aqueous solution is around 100 ppm, in line with colorimetric methods currently on the market. These results show the effectiveness of the proposed system in biological detection applications and encourage further developments in implementing these kinds of devices in the biomedical field.

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“…The active microchannel arrays were fabricated from an SU-8 substrate, a flexible photosensitive polymer commonly used in the microelectronics industry because of its versatility and potential for generating high aspect-ratio structures [17]. As a biocompatible polymer [18,19] SU-8 has been extensively explored and used as an implant material for biomedical devices [20].…”

Section: Active Microchannel Electrode Array Fabricationmentioning

confidence: 99%

“…As a biocompatible polymer [18,19] SU-8 has been extensively explored and used as an implant material for biomedical devices [20]. It was employed to fabricate our microchannel arrays, balancing functionality, scalability, and ease-of-use.…”

Section: Active Microchannel Electrode Array Fabricationmentioning

confidence: 99%

Assessment of Nerve Regeneration through a Novel Microchannel Array

Maimon¹,

Zorzos²,

Song³

et al. 2016

Int J Phys Med Rehabil

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Advancements in robotic technologies have enabled a significant improvement in the clinical efficacy of prosthetic limbs for persons with upper and lower-extremity amputations. However, significant challenges still remain in establishing a biomimetic bidirectional neural communication between amputees and their external powered prostheses. Regenerative peripheral nerve interfaces may offer a high-resolution alternative to conventional nerve interface technologies for their unique potential to provide increased biospatial resolution for both the control of and feedback from an external powered prosthesis. Here, we present three separate design for 3-D microchannel arrays, each having 16-20 channels measuring 200 μm by 200 μm: one passive (without integrated electrodes), one active (with integrated electrodes), and one active with a porous collagen scaffold. With the array positioned between proximal and distal nerve sendings, we evaluate their effectiveness in tibial n. regeneration in vivo in both rats (N=4) and ferrets (N=4). Using immunofluorescence, we report robust mixed sensory and motor nerve regeneration through the microchannels in all rats, and weak regeneration in 2 of 4 ferrets, suggesting both interspecies regeneration variability and the lack of benefit of axially oriented collagen in improving ferret nerve regeneration through microchannels.

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SU-8-Based Structural Material for Microelectronic Processing Applications

Cited by 12 publications

References 26 publications

Development of hot embossing stamps with conformal cooling channels for microreplication

Development of hot embossing stamps with conformal cooling channels for microreplication

On-Glass Integrated SU-8 Waveguide and Amorphous Silicon Photosensor for On-Chip Detection of Biomolecules: Feasibility Study on Hemoglobin Sensing

Assessment of Nerve Regeneration through a Novel Microchannel Array

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