SU-8 micromachining of millimeter and submillimeter waveguide circuits

Smith, C.D.; Sklavonuos, Angelique; Barker, N. Scott

doi:10.1109/mwsym.2009.5165858

Cited by 16 publications

(10 citation statements)

References 9 publications

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“…It is also interesting to note that the TINTIN consortium first reported the concept of SU-8 formed split-block waveguides, using their snap-together techniques, demonstrating a loss of ∼0.5 dB/λ g at W-band [15]. More recently, Smith et al [18] have demonstrated WR-3.4 band (220-330 GHz) split-block waveguides and cylindrical cavities. The most recently reported work on SU-8 formed split-block waveguides, from the University of Birmingham (U.K.), also showed impressive results at 60 GHz [19], 280 GHz [20], [21], and 650 GHz [22].…”

mentioning

confidence: 99%

3-D Printed Metal-Pipe Rectangular Waveguides

D'Auria

Otter

Hazell

et al. 2015

IEEE Trans. Compon., Packag. Manufact. Technol.

269

135

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This paper first reviews manufacturing technologies for realizing air-filled metal-pipe rectangular waveguides (MPRWGs) and 3-D printing for microwave and millimeter-wave applications. Then, 3-D printed MPRWGs are investigated in detail. Two very different 3-D printing technologies have been considered: low-cost lower-resolution fused deposition modeling for microwave applications and higher-cost high-resolution stereolithography for millimeter-wave applications. Measurements against traceable standards in MPRWGs were performed by the U.K.'s National Physical Laboratory. It was found that the performance of the 3-D printed MPRWGs were comparable with those of standard waveguides. For example, across X-band (8-12 GHz), the dissipative attenuation ranges between 0.2 and 0.6 dB/m, with a worst case return loss of 32 dB; at W-band (75-110 GHz), the dissipative attenuation was 11 dB/m at the band edges, with a worst case return loss of 19 dB. Finally, a high-performance W-band sixth-order inductive iris bandpass filter, having a center frequency of 107.2 GHz and a 6.8-GHz bandwidth, was demonstrated. The measured insertion loss of the complete structure (filter, feed sections, and flanges) was only 0.95 dB at center frequency, giving an unloaded quality factor of 152-clearly demonstrating the potential of this low-cost manufacturing technology, offering the advantages of lightweight rapid prototyping/manufacturing and relatively very low cost when compared with traditional (micro)machining.

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mentioning

confidence: 99%

3-D Printed Metal-Pipe Rectangular Waveguides

D'Auria

Otter

Hazell

et al. 2015

IEEE Trans. Compon., Packag. Manufact. Technol.

269

135

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“…SU-8 photoresist is a promising technology for manufacturing millimeter and submillimeter waveguide components, and is used for the second filter discussed in this paper. SU-8 is a photolithographically patterned, epoxy-based, resin that is resistant to organic solvents once cured, and can have a thickness ranging from 0.5 µm to 1 mm [15]. There are several advantages of using SU-8 micromachining over CNC machining.…”

Section: Wr-3 Waveguide Bandpass Filters Fabricated Usingmentioning

confidence: 99%

“…It may also allow sharper internal corners and higher corner radius to depth ratios. Meanwhile, the SU-8 process is a batch fabrication which allows repeatability between devices as well as production of several devices in a single fabrication run [15]. Compared with DRIE, standard photolithography processes are used with SU-8 with better surface roughness on the sidewalls of waveguide structures [15].…”

Section: Wr-3 Waveguide Bandpass Filters Fabricated Usingmentioning

confidence: 99%

“…Meanwhile, the SU-8 process is a batch fabrication which allows repeatability between devices as well as production of several devices in a single fabrication run [15]. Compared with DRIE, standard photolithography processes are used with SU-8 with better surface roughness on the sidewalls of waveguide structures [15]. SU-8 photoresist technology has been employed to demonstrate filters in the WR-10 [11], WR-3 [12], and WR-1.5 bands [13].…”

Section: Wr-3 Waveguide Bandpass Filters Fabricated Usingmentioning

confidence: 99%

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WR-3 Waveguide Bandpass Filters Fabricated Using High Precision CNC Machining and SU-8 Photoresist Technology

Yang

Dhayalan

Shang

et al. 2018

IEEE Trans. THz Sci. Technol.

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This paper presents two WR-3 band (220-325 GHz) filters, one fabricated in metal using high precision computer numerically controlled milling and the other made with metallized SU-8 photoresist technology. Both are based on three coupled resonators, and are designed for a 287.3-295.9-GHz passband, and a 30-dB rejection between 317.7 and 325.9 GHz. The first filter is an extracted pole filter coupled by irises, and is precision milled using the split-block approach. The second filter is composed of three silver-coated SU-8 layers, each 432 µm thick. The filter structures are specially chosen to take advantage of the fabrication processes. When fabrication tolerances are accounted for, very good agreement between measurements and simulations are obtained, with median passband insertion losses of 0.41 and 0.45 dB for the metal and SU-8 devices, respectively. These two filters are potential replacements of frequency selective surface filters used in heterodyne radiometers for unwanted sideband rejection. Index Terms-Micromachining, SU-8, terahertz components, waveguide filter. I. INTRODUCTION M ULTICHANNEL air and spaceborne sounders are employed for spectroscopic characterization of the Earth's atmosphere [1]. These instruments perform molecular spectroscopy at millimeter and submillimeter wavelengths in relatively narrow frequency channels. Within the instrument, linearly polarized signals are frequency demultiplexed by a Manuscript

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“…A variety of microwave circuits, including phase shifters [6], recongurable matching networks [7], and tunable lters [8] have all been demonstrated using RF MEMS devices. In addition MEMS fabrication techniques, known as micromachining, have been used to develop a variety of passive microwave components such as planar inductors and transformers, antennas, and guided wave structures [9,10]. The success of these devices has led to increased interest in using MEMS (and MEMS fabrication techniques) in RF and microwave systems.…”

Section: Rf Mems Technology and Applicationsmentioning

confidence: 99%

RF MEMS for Cryogenic Applications

Bruno

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RF MEMS (Radio Frequency Microelectromechanical Systems) has been a rapidly expanding eld for the last decade. This expansion is driven by the need for low power, high linearity and high performance devices for wireless, defense, and scientic applications. NASA has a vested interest in RF MEMS switches for signal routing and phase modulation in their next generation of Cosmic Microwave Background (CMB) measurements. Recently detected anisotropies in the polarization of the CMB by the BICEP2 detector have provided insight to the structure and energy of the inationary period right after the Big Bang and NASA looks to expand on that success with the Beyond Einstein Ination Probe which will map the polarization of CMB over the entire sky. This work investigates the fabrication and reliability of RF MEMS devices as possible candidates for phase modulators operating on a satellite platform for CMB measurements at temperatures close to absolute zero. RF MEMS DC-contact series switches have been implemented from DC − 30 GHz on superconducting Nb microstrip on 5 µm silicon-on-insulator (SOI) substrates. The devices were built using a novel fabrication process that uses the device layer of the SOI as the microstrip dielectric. Tunable resonators (f c = 16 GHz) have been designed and fabricated using the RF MEMS switches to tune f c in 1 GHz steps. RF performance of the switches and resonators are presented.The contact resistance (R C ) when the switch is closed is also of interest because variations in R C could introduce errors into CMB measurements. A closed-cycle cryostat has been modied to measure shifts in R C as the devices are actuated. Reliability testing of the devices at 4 K show that the devices are currently unreliable for long term operation at cryogenic temperatures, with device lifetimes less that one million contacts. Device failure is in the form of stiction, or a permanently closed switch that will no longer actuate. Charging of the substrate underneath the MEMS switch has been determined as the main cause of stiction at 4 K. Results and possible solutions to prolong operation lifetime are discussed.

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SU-8 micromachining of millimeter and submillimeter waveguide circuits

Cited by 16 publications

References 9 publications

3-D Printed Metal-Pipe Rectangular Waveguides

3-D Printed Metal-Pipe Rectangular Waveguides

WR-3 Waveguide Bandpass Filters Fabricated Using High Precision CNC Machining and SU-8 Photoresist Technology

RF MEMS for Cryogenic Applications

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