2011
DOI: 10.1364/oe.19.018956
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SU8 3D prisms with ultra small inclined angle for low-insertion-loss fiber/waveguide interconnection

Abstract: This paper presents a simple method for fabricating SU8 three dimensional (3D) prisms with very small inclined-angles for optical-fiber/planar-waveguide interconnection with low insertion-loss by combining self-filling, molding and nano-lithography processes on plane surface. The prisms possess ultra low 3D inclined angle of 0.6° and a small surface roughness of 3.5 nm. It is demonstrated that the transmission efficiency of SOI waveguides improved about 4.6 times at the presence of SU8 prisms with a coupling l… Show more

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Cited by 11 publications
(7 citation statements)
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“…With the overlap interface, light is coupled from SU8 prism to SOI WG not only via tight cross-section face, but also through the SU8 overlap on SOI WG's surface. Experimentally, if the SU8 overlap's edge on SOI WG has near zero-height, light coupling can be reached close to simulation result (the method for fabrication of prism with zero-height edge is presented in our work [6]). …”
Section: Iib Coupling Possibilities and Lossessupporting
confidence: 74%
See 1 more Smart Citation
“…With the overlap interface, light is coupled from SU8 prism to SOI WG not only via tight cross-section face, but also through the SU8 overlap on SOI WG's surface. Experimentally, if the SU8 overlap's edge on SOI WG has near zero-height, light coupling can be reached close to simulation result (the method for fabrication of prism with zero-height edge is presented in our work [6]). …”
Section: Iib Coupling Possibilities and Lossessupporting
confidence: 74%
“…The common disadvantages of these methods are complicated process and time-consuming alignment. In our previous work [6], a method to fabricate fiber/waveguide interconnections with 3D SU8 prism having ultra small inclined angle was presented. The best transmission efficiency of the structure was 55 %.…”
Section: Introductionmentioning
confidence: 99%
“…A secondary core made of There are also some 3D tapers assisted with other materials to match with the fiber core considering both the size and the effective index as Figure 14d depicts. Amorphous silicon [100,101], SU-8 [92,102], SiON [92], and other kinds of index-matching materials are applied in such situations. These materials are compatible with silicon photonic platform and have a moderate refractive index between silicon dioxide and silicon, which can help improve the modal match between the fiber and the waveguide.…”
Section: Edge Couplers Based On Three-dimensional Tapermentioning
confidence: 99%
“…3 dB alignment tolerance of the coupler to TE mode and TM mode up to ± 3.7 μm. The fabrication of 3D waveguides has been realized on SOI platform 14 . Our proposed device is promising as a useful component for the efficient coupling between the practical LN photonic integrated circuits and standard single-mode optical fibers.…”
Section: Discussionmentioning
confidence: 99%