SU8 ridge-gap waveguide resonator

Rahiminejad, Sofia; Pucci, Elena; Haasl, Sjoerd; Enoksson, Peter

doi:10.1017/s1759078714000609

Cited by 10 publications

(12 citation statements)

References 13 publications

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“…An open-ended ridge gap waveguide resonator has been designed with one row of pins at the end of the ridge section. The layout of the resonator is similar to the ridge gap resonator for 220–325 GHz presented in [ 19 , 36 , 37 , 38 ]. We optimized the design of the ridge gap resonator used in our study based on the thickness of dry films that were available.…”

Section: Structure and Design Of Ridge Gap Waveguide Resonatormentioning

confidence: 99%

“…The reported edge bead for thick SU8 photoresists is higher than 30 µm for a thickness of 100 µm [ 18 ]. Furthermore, the thick SU8 layer needs a very long curing time, and is prone to instability and delamination [ 19 , 20 ]. Additionally, the processing time is very long as SU8 needs long relaxation times in between each step to reduce stress.…”

Section: Introductionmentioning

confidence: 99%

“…A simple ridge gap waveguide structure is shown in Figure 1 . Recently, many gap waveguide passive components have been demonstrated and realized using the conventional manufacturing method [ 32 , 33 , 34 ] as well as by using micromachining techniques [ 19 , 35 , 36 ].…”

Section: Introductionmentioning

confidence: 99%

“…Previously, the ridge gap resonator was fabricated using silicon micromachining [ 36 ], SU8 micromachining [ 19 ], carbon nanotubes (CNTs) [ 37 ], and off-stoichiometry thiol–enes-epoxy polymer (OSTEMER) [ 38 ]. In this work, we demonstrate the application of SUEX dry film photoresist for mm-wave components by fabrication of a ridge gap waveguide resonator working above 200 GHz and analyzing the quality factor of the fabricated resonator.…”

Section: Introductionmentioning

confidence: 99%

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Dry Film Photoresist-Based Microfabrication: A New Method to Fabricate Millimeter-Wave Waveguide Components

et al. 2021

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This paper presents a novel fabrication method based on dry film photoresists to realize waveguides and waveguide-based passive components operating at the millimeter-wave frequency (30–300 GHz). We demonstrate that the proposed fabrication method has a high potential as an alternative to other microfabrication technologies, such as silicon-based and SU8-based micromachining for realizing millimeter-wave waveguide components. Along with the nearly identical transfer of geometrical structures, the dry film photoresist offers other advantages such as fewer processing steps, lower production cost, and shorter prototyping time over the conventional micromachining technologies. To demonstrate the feasibility of the fabrication process, we use SUEX dry film to fabricate a ridge gap waveguide resonator. The resonator is designed to exhibit two resonances at 234.6 and 284 GHz. The measured attenuation at 234 GHz is 0.032 dB/mm and at 283 GHz is 0.033 dB/mm for the fabricated prototype. A comparative study among different existing technologies indicates that the reported method can give a better unloaded Q-value than other conventional processes. The measured unloaded Q-values are in good agreement with the simulated unloaded Q-values. The signal attenuation indicates that SUEX dry film photoresists can be used to fabricate passive devices operating at millimeter-wave frequencies. Moreover, this new fabrication method can offer fast and low-cost prototyping.

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Section: Structure and Design Of Ridge Gap Waveguide Resonatormentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Dry Film Photoresist-Based Microfabrication: A New Method to Fabricate Millimeter-Wave Waveguide Components

et al. 2021

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“…For instance, to the authors experience, CNT devices are manufactured 50 times faster than DRIE ones. Also, the designs in [869] were manufactured using SU-8 in [879] with a total time process of 5 hours front the 2 hours provided by the CNT manufacturing process. A RGW resonator to work in the WR-3 operation band (220 GHz-325 GHz) is designed.…”

Section: High Frequency Designs and Manufacturing Techniquesmentioning

confidence: 99%

Analysis and design of efficient passive components for the millimeter-wave and THz bands

Verdú¹,

Antonio²

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To my parents, brother and sister."Success is peace of mind which is a direct result of self-satisfaction in knowing you made the effort to become the best of which you are capable."Jonh Wooden "Lo que con mucho trabajo se adquiere, más se ama." Aristóteles AgradecimientosLa realización de esta tesis ha implicado no pocos años de trabajo y esfuerzo. Durante este importante periodo de mi vida han sido muchas las personas han estado a mi lado, brindándome su apoyo, ayuda, cariño y amor. Ya sea de una forma u otra, todas estas personas han contribuido a que este trabajo haya sido posible dando como fruto esta tesis. A todos ellos, me gustaría dedicarles un agradecimiento muy especial de todo corazón.Sin duda alguna, debo dar las gracias en primer lugar a mi director de tesis Mariano Baquero. Mariano, has sido un padre para mí profesionalmente hablando. Te conocí como alumno en las clases de Microondas, en las cuales me abriste la puerta a un conocimiento que me fascinó.Recuerdo perfectamente cuando fui a verte para preguntarte si podrías dirigirme el Proyecto Final de Carrera, y desde ese año 2009 hemos estado trabajando juntos. Quiero agradecerte no sólo haberme dado la oportunidad de trabajar en cada momento en elárea que más me ha gustado, sino el haberte preocupado por mí a nivel personal, velando siempre por mis intereses, ayudándome a desarrollarme personal y profesionalmente. Extiendo en este sentido mi agradecimiento a Miguel Ferrando. Si Mariano es el padre, tu serías sin duda el abuelo. Sin tu ayuda, la beca para la realización de esta tesis y los proyectos que han respaldado la misma no hubieran sido posibles. Tu esfuerzo ha permitido que el Grupo de Radiación Electromagnética (GRE) esté hoy dónde esta y que sus miembros nos beneficiemos de un entorno de trabajo excelente, produciendo trabajo de calidad. Debo agradecerte también tus siempre innovadoras ideas, algunas de las cuales se han convertido en una realidad plasmada en esta tesis.Una mención especial merece Daniel Sánchez. Dani, aunque tu nombre no figure como co-director bien sabes que podría estarlo. Jamás podré agradecerte lo suficiente la ayuda que me has prestado. Cuántas horas dedicadas a enseñarme en un sin fin de aspectos sin esperar nada a cambio, apoyándome también en los momentos difíciles, siempre presentes en una tesis. Bien sabes que lo mismo has hecho con cada uno tus compañeros, por eso eres el pilar del GRE Dani.Otra persona a la que estoy muy agradecido es a Vicente Boria. Tu activa colaboración en la dirección de esta tesis ha sido indispensable para la consecución de los resultados más relevantes de la misma. Sugeriste muy acertadamente una estancia en la Queen's University of Belfast, y me abriste la puerta a nuevas líneas de investigación en las cuales seguimos trabajando actualmente. Gracias por preocuparte por mi a nivel profesional y personal.En elámbito anterior, extiendo los agradecimientos a todo el GRE. It is also very important for me to acknowledge Prof. Vince Fusco. Thank you for hosting me in your group in Belfast ...

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Realizing a 140 GHz Gap Waveguide–Based Array Antenna by Low-Cost Injection Molding and Micromachining

Farjana

Ghaderi

Zaman

et al. 2021

J Infrared Milli Terahz Waves

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This paper presents a novel micromachining process to fabricate a 140 GHz planar antenna based on gap waveguide technology to be used in the next-generation backhauling links. The 140 GHz planar array antenna consists of three layers, all of which have been fabricated using polymer-based microfabrication and injection molding. The 140 GHz antenna has the potential to be used as an element in a bigger 3D array in a line-of-sight (LOS) multiple input multiple output (MIMO) configuration to boost the network capacity. In this work, we focus on the fabrication of a single antenna array element based on gap waveguide technology. Depending on the complexity of each antenna layer’s design, three different micromachining techniques, SU8 fabrication, polydimethylsiloxane (PDMS) molding, and injection molding of the polymer (OSTEMER), together with gold (Au) coating, have been utilized to fabricate a single 140 GHz planar array antenna. The input reflection coefficient was measured to be below − 11 dB over a 14% bandwidth from 132 to 152 GHz, and the antenna gain was measured to be 31 dBi at 140 GHz, both of which are in good agreement with the simulations.

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SU8 ridge-gap waveguide resonator

Cited by 10 publications

References 13 publications

Dry Film Photoresist-Based Microfabrication: A New Method to Fabricate Millimeter-Wave Waveguide Components

Dry Film Photoresist-Based Microfabrication: A New Method to Fabricate Millimeter-Wave Waveguide Components

Analysis and design of efficient passive components for the millimeter-wave and THz bands

Realizing a 140 GHz Gap Waveguide–Based Array Antenna by Low-Cost Injection Molding and Micromachining

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