2012
DOI: 10.3762/bjnano.3.98
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Sub-10 nm colloidal lithography for circuit-integrated spin-photo-electronic devices

Abstract: SummaryPatterning of materials at sub-10 nm dimensions is at the forefront of nanotechnology and employs techniques of various complexity, efficiency, areal scale, and cost. Colloid-based patterning is known to be capable of producing individual sub-10 nm objects. However, ordered, large-area nano-arrays, fully integrated into photonic or electronic devices have remained a challenging task. In this work, we extend the practice of colloidal lithography to producing large-area sub-10 nm point-contact arrays and … Show more

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Cited by 10 publications
(5 citation statements)
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“…In colloidal lithography, self-assembled nanoparticle crystal structures with a short-range intrinsic order are created on planar surfaces to serve as masks for subsequent etching processes (Fig. 1c) [3942]. Colloidal lithography does not possess the accuracy and on-demand control over spatial patterns it can generate, as compared to photolithography and EBL.…”
Section: Fabrication Of Nanotopographical Surfacesmentioning
confidence: 99%
See 1 more Smart Citation
“…In colloidal lithography, self-assembled nanoparticle crystal structures with a short-range intrinsic order are created on planar surfaces to serve as masks for subsequent etching processes (Fig. 1c) [3942]. Colloidal lithography does not possess the accuracy and on-demand control over spatial patterns it can generate, as compared to photolithography and EBL.…”
Section: Fabrication Of Nanotopographical Surfacesmentioning
confidence: 99%
“…Colloidal lithography does not possess the accuracy and on-demand control over spatial patterns it can generate, as compared to photolithography and EBL. To generate nanotopography with different spatial patterns, colloidal lithography can utilize different crystal structures of self-assembled colloidal masks and alter incidence angle of plasma that etches the underlying surface [3942]. …”
Section: Fabrication Of Nanotopographical Surfacesmentioning
confidence: 99%
“…Nanosphere lithography (NSL) has emerged as an alternative method to fabricate ordered nanostructures over a large surface area that is low-cost and scalable. 21,22 In one example, hard polystyrene (PS) spheres were self-assembled into a hexagonal close packed structure on a substrate and used as a mask for Au deposition onto the substrate. 22 That is, Au is deposited on the substrate through the interstices between the assembled PS spheres resulting in an ordered array of Au triangles aer PS removal from the substrate.…”
Section: Introductionmentioning
confidence: 99%
“…Self-assembled nanosphere arrays have aroused much attention for producing ordered nanostructures, especially nonclose-packed nanopatterns, which are of considerable technological significance in fabricating arrays of nanoballs, nanopillars, nanodiscs, , nanobowls, nanoneedles, and nanorings as well. , The periodic nanostructures were easily fabricated in a large area and being pursued for variety of applications, for instance, in optical devices, , data storage, biosensors, as well as lithography for multiple purposes. Here we would like to present a facile nanosphere lithographic process using various gentle solvent treatments to produce “bottom-up” and “bottom-down” nonclose-packed patterns and to investigate their practical applications in nanolenses for optical display and nanosuckers for adhesion.…”
mentioning
confidence: 99%