2005
DOI: 10.1002/smll.200500202
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Sub‐100 nm, Centimeter‐Scale, Parallel Dip‐Pen Nanolithography

Abstract: Atomic force microscope (AFM) cantilever linear arrays are used for parallel dip‐pen nanolithography (DPN). Three different tip configurations are studied, all of which involve only a single feedback system in a conventional AFM instrument or an Nscriptor, a dedicated instrument designed for DPN. A simple and convenient tip–substrate alignment procedure provides centimeter‐scale, sub‐100 nm resolution patterning (see micrograph image).

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Cited by 127 publications
(104 citation statements)
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“…To address this problem, a sub-100 nm, centimeter-scale, parallel DPN method using multiple-probes has been recently reported, demonstrating a marked increase in the DPN throughput. [ 22 ] A novel 55000-pen two-dimensional (2D) array was used to pattern gold substrata with sub-100 nm resolution over square centimeter areas. [ 23 ] More recently, polymer pen lithography, which uses a soft elastomeric tip array rather than hard silicon or silicon nitride tips mounted on individual cantilevers, has also emerged as a possible solution.…”
Section: Progress Reportmentioning
confidence: 99%
“…To address this problem, a sub-100 nm, centimeter-scale, parallel DPN method using multiple-probes has been recently reported, demonstrating a marked increase in the DPN throughput. [ 22 ] A novel 55000-pen two-dimensional (2D) array was used to pattern gold substrata with sub-100 nm resolution over square centimeter areas. [ 23 ] More recently, polymer pen lithography, which uses a soft elastomeric tip array rather than hard silicon or silicon nitride tips mounted on individual cantilevers, has also emerged as a possible solution.…”
Section: Progress Reportmentioning
confidence: 99%
“…On the other hand, disposable arrays of tens, or even hundreds of cantilevers can be mass produced at low cost by adopting well-established microfabrication techniques used in the semiconductor industry in the last decades. 39,40 Arrays of microcantilevers allow the simultaneous detection of tens of targets, which is demanding for the development of artificial noses, biochemical assays, early disease detection, and prognosis of diseases. Also, cross-sensitivities can be significantly minimized by using cantilever arrays by measuring the differential cantilever bending with respect to one or several cantilevers acting as references.…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, to overcome the serial nature of cantilever-based techniques, parallel approaches can be developed to meet specific requirements in terms of throughput and fabrication costs. [9] For the fabrication of biochips, miniaturized silicon quills bring two main salient features when compared to dip-pen nanolithography (DPN) or related techniques. The first one is that the presence of channels and reservoirs ensuring a continuous liquid transfer is a key factor to keep biomolecules biologically active during the fabrication process.…”
mentioning
confidence: 99%