2003
DOI: 10.1049/el:20031080
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Sub-bandgap photonic gated-diode method for extracting distributions of interface states in MOSFETs

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Cited by 3 publications
(2 citation statements)
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“…Characterizing n-and p-MOSFETs on the same wafer, the extracted in the photoresponsive energy band [ in NMOS and in PMOS capacitors] is comparatively shown in Fig. 4 with obtained from the photonic gated-diode method [10]. Extracted trap density ranges eV cm and shows a typical U-shaped distribution between and [7].…”
Section: Resultsmentioning
confidence: 99%
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“…Characterizing n-and p-MOSFETs on the same wafer, the extracted in the photoresponsive energy band [ in NMOS and in PMOS capacitors] is comparatively shown in Fig. 4 with obtained from the photonic gated-diode method [10]. Extracted trap density ranges eV cm and shows a typical U-shaped distribution between and [7].…”
Section: Resultsmentioning
confidence: 99%
“…We note that the subthreshold saturation current and the subthreshold slope through the ideality factors ( and ) depend strongly on the gate voltage through the depletion capacitance . The photoinduced trap capacitance can be obtained from the difference between the ideality factors ( and ) as (10) therefore, the interface trap density can be finally obtained from (11)…”
Section: Optical Subthreshold Current Methodsmentioning
confidence: 99%