Sub-mA Threshold Current Vertical Cavity Surface Emitting Lasers with a Simple Fabrication Process

Baker, Jack; Gillgrass, Sara; Allford, Craig P.; Hentschel, Curtis; Davies, J. I.; Shutts, Samuel; Smowton, Peter M.

doi:10.1109/ipc48725.2021.9592977

Cited by 2 publications

(1 citation statement)

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“…To address this issue, a VCSEL Quick Fabrication process (VQF) was previously designed [8] such that, for a given epitaxial structure, key characteristics of device performance can be rapidly assessed and used as feedback for growth conditions. The VQF process was previously demonstrated for 940 nm high-power applications [8,9], and here, we show its efficacy for the more stringent test in the production of ~895 nm emitting VCSEL epi for MACs.…”

Section: Introductionmentioning

confidence: 54%

VCSEL quick fabrication of 894.6 nm wavelength epi‐material for miniature atomic clock applications

Baker

Allford

Gillgrass

et al. 2022

IET Optoelectronics

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A vertical cavity surface emitting laser (VCSEL) quick fabrication (VQF) process is applied to epitaxial materials designed for miniature atomic clock applications (MACs). The process is used to assess material quality and uniformity of a full 100 mm (4-inch) wafer against the stringent target specification of VCSELs for MACs. Target specifications in optical power (>0.6 mW) and differential efficiencies (<0.5 W/A) are achieved over large portions of a wafer; however, the variation in the oxide aperture diameter is shown to limit the yield. The emission of the fundamental mode at 894.6 nm at 70 ℃ is met over a significant area of the wafer for ~4 μ m aperture multi-mode devices. The consideration of the on-wafer variation reveals that further optimisation is required to increase the device yield to levels required for volume manufacture.This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited.

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Section: Introductionmentioning

confidence: 54%