Sub-micrometre luminescent porous silicon structures using lithographically patterned substrates

Nassiopoulos, A. G.; Grigoropoulos, S.; Canham, Leigh; Halimaoui, A.; Berbézier, Isabelle; Gogolides, Εvangelos; Papadimitriou, D.

doi:10.1016/0040-6090(94)05675-4

Cited by 65 publications

(31 citation statements)

References 9 publications

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“…Finally, the ease with which porous Si can be integrated into well-established Si microelectronics fabrication techniques could also lead to more sophisticated, active devices for medical applications [65,89,198]. The possibility of placing active electronic circuit components into the silicon-based particles is another feature of silicon that is yet to be exploited for in vivo use.…”

Section: Summary and Prospectsmentioning

confidence: 99%

Porous silicon in drug delivery devices and materials☆

Anglin

Cheng

Freeman

et al. 2008

Advanced Drug Delivery Reviews

808

618

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Porous Si exhibits a number of properties that make it an attractive material for controlled drug delivery applications: The electrochemical synthesis allows construction of tailored pore sizes and volumes that are controllable from the scale of microns to nanometers; a number of convenient chemistries exist for the modification of porous Si surfaces that can be used to control the amount, identity, and in vivo release rate of drug payloads and the resorption rate of the porous host matrix; the material can be used as a template for organic and biopolymers, to prepare composites with a designed nanostructure; and finally, the optical properties of photonic structures prepared from this material provide a self-reporting feature that can be monitored in vivo. This paper reviews the preparation, chemistry, and properties of electrochemically prepared porous Si or SiO 2 hosts relevant to drug delivery applications.

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Section: Summary and Prospectsmentioning

confidence: 99%

Porous silicon in drug delivery devices and materials☆

Anglin

Cheng

Freeman

et al. 2008

Advanced Drug Delivery Reviews

808

618

View full text Add to dashboard Cite

show abstract

“…The mask must be HF resistant or stable enough to withstand HF during anodization. Standard photoresists can be used but are degraded during anodization leading to undercutting and anodization through the mask via pinholes [32][33][34]. Si dioxide can be used for short anodization times [32,35].…”

Section: Effect Of Anodization Conditionsmentioning

confidence: 99%

“…Standard photoresists can be used but are degraded during anodization leading to undercutting and anodization through the mask via pinholes [32][33][34]. Si dioxide can be used for short anodization times [32,35]. Stoichiometric silicon nitride and silicon carbide induces stress problems leading to cracking [32,36].…”

Section: Effect Of Anodization Conditionsmentioning

confidence: 99%

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Silicon Nanocrystals in Porous Silicon and Applications

Gelloz

2010

Silicon Nanocrystals

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“…Local Thermal Isolation by Thick PS Layers The process for local formation of thick porous silicon layers has been described in detail elsewhere [2,4]. When p-type wafers are used, the process is isotropic, so the PS layer is simultaneously formed in both z and x±y directions, under the mask.…”

mentioning

confidence: 99%

Porous Silicon as an Effective Material for Thermal Isolation on Bulk Crystalline Silicon

Nassiopoulou

Kaltsas

2000

phys. stat. sol. (a)

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Highly porous silicon has been successfully used to create thermally isolated local areas on bulk crystalline silicon, for the fabrication of silicon integrated sensors. Heat distribution and heat transfer have been simulated by using finite element analysis with the ANSYS software. Three cases were compared: the case of bulk crystalline silicon, the case of porous silicon and that of free standing polycrystalline silicon membranes. A flow sensor of the thermal type using porous silicon isolation has been designed and fabricated, showing high sensitivity and rapid response. Its operation principle and main characteristics will be presented.Introduction Highly porous silicon shows a thermal conductivity of the order of 1.2 W/mK [1], which is 120 times lower than that of bulk crystalline silicon. This gives wide possibilities for applications in silicon integrated sensors and microsystems. Thermally isolated areas may be locally created on a silicon wafer by selective electrochemical dissolution of bulk silicon through a patterned masking layer [2,3]. The most effective masking material in this respect is undoped polycrystalline silicon, which shows very high etching resistance to the chemical solution used for porous silicon (PS) formation. It can be used to grow thick porous silicon layers, providing good thermal isolation compared to bulk crystalline silicon.In this paper, the thermal isolation approach mentioned above is used to design and fabricate a miniaturized silicon flow sensor of the thermal type.

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Sub-micrometre luminescent porous silicon structures using lithographically patterned substrates

Cited by 65 publications

References 9 publications

Porous silicon in drug delivery devices and materials☆

Porous silicon in drug delivery devices and materials☆

Silicon Nanocrystals in Porous Silicon and Applications

Porous Silicon as an Effective Material for Thermal Isolation on Bulk Crystalline Silicon

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