Sub-micron and high precision micro-machining using nanosecond lasers

Knowles, M. R. H.; Rutterford, Graham; Bell, Andrew; Andrews, Anthony T.; Foster-Turner, G.; Kearsley, A. J.; Coutts, David W.; Kapitan, D.; Webb, C. E.

doi:10.2351/1.5059138

Cited by 9 publications

(3 citation statements)

References 9 publications

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“…Ablation occurs when the electron pressure becomes stronger than the binding force ( 2 Mbar Table 1 shows that reducing the laser pulse width by up to 6 orders of magnitude can only reduce the thermal difftision length by factors 2 -6. For ns pulses, the diffusion length is 1 jim and is acceptable in laser micromachining [16]. Luft et al compared drilling results between a copper vapour laser (50 ns) and a CPA Ti:Sa laser (200 fs) and found that at laser fluences well above the ablation threshold, the recast layer in drilled holes was several microns thick for both lasers [17].…”

Section: Max (mentioning

confidence: 97%

Fabrication of micropumps with Q-switched Nd:YAG-lasers

Mai

Nguyen

2002

SPIE Proceedings

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Microfluidics has become one of the most intense research fields in MEMS technology. In this paper, the use of a 1064 nm Q-switched solid state laser to fabricate micro-pump cavities in copper is presented. The focusing technique is employed for directly structuring the micro-pumps and mixers. In this case, a laser beam with a focal spot of 50 jtm is scanned over the surface and the substrate material is ablated track by track and layer by layer. Machining results such as surface finishing and dimensional resolution are discussed. The dependence of the ablation depth, ablation rate and surface roughness on the process parameters and on the scan overlap are investigated. The laser micromachined structures are free of cracks and without any deposition of debris on the surface. The assembly and first characterization results of the pumps are reviewed. The capability as well as the potential of laser micromachining are also discussed.

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Section: Max (mentioning

confidence: 97%

Fabrication of micropumps with Q-switched Nd:YAG-lasers

Mai

Nguyen

2002

SPIE Proceedings

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“…Different optical configurations are available today for obtaining an interference pattern. In all cases, a single intrinsic laser beam is divided into several sub-beams, with different beam splitting techniques available to be used (e.g., beam-splitters [34,35,36], diffractive optical elements [37,38,39], and refractive optics [40]). Then, the irradiated surface is affected locally at the interference maxima positions (e.g., by melting or ablation), allowing the fabrication of the periodic structure.…”

Section: Introductionmentioning

confidence: 99%

High Throughput Direct Laser Interference Patterning of Aluminum for Fabrication of Super Hydrophobic Surfaces

2019

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This work addresses the fabrication of hydrophobic surface structures by means of direct laser interference patterning using an optical setup optimized for high throughput processing. The developed optical assembly is used to shape the laser beam intensity as well as to obtain the two sub beams required for creating the interference pattern. The resulting beam profile consists of an elongated rectangular laser spot with 5.0 mm × 0.1 mm size, which enables the optimized utilization of the laser fluence available from an ns-pulsed laser with a wavelength of 1064 nm. Depending on the pulse repetition rate applied, heating of the substrate volume generated by heat accumulation encouraged exceptionally high aspect ratios of the trench structures due to melt flow dynamic material deformation. Finally, water contact angle measurements of the produced structures permitted the demonstration of the capability of controlling the wetting angle, in which this effect does not only depend on the height of the generated surface structures but also on their morphology.

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“…Owing to the development of nano technology, the micro machining like precision machining and thin material processing are applying heat sources of high energy and high power density like laser beam, electronic beam, plasma, etc rather than the existing arc heat sources [1] [2]. Nd:YAG laser, using its optic fiber transferable characteristics, has been made possible to be applied in automated lines and was further accelerated for practical use as its output power recently soured [3][4].…”

Section: Introductionmentioning

confidence: 99%

Optimization of Welding Conditions for Sealing of Lithium-Ion Battery by Pulsed Nd:YAG Laser

Kim

Yoo²,

Kim

2008

MSF

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Laser material processing is a very rapidly advancing technology for various industrial applications, because of its many advantages. A few of its major advantages, less yet better controlled heat input, have been successfully exploited for the very critical application of aluminum alloy welding. This study suggested the source of weld-defects and its solution methods in welding a lithium ion battery with pulsed Nd:YAG laser. In the experiment, battery case has changed over joint geometry from side welding to flat welding. In the case of an electrolyte inlet seal welding, welding was carried out after pressing an Al ball and the degree of eccentricity, the contact length and the gap are presented as major parameters. With the Al ball indent improvement, the eccentricity and the gap were reduced and the contact length was increased. As a result of an experiment, a sound weld bead shape and crack-free weld bead were obtained.

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Sub-micron and high precision micro-machining using nanosecond lasers

Cited by 9 publications

References 9 publications

Fabrication of micropumps with Q-switched Nd:YAG-lasers

Fabrication of micropumps with Q-switched Nd:YAG-lasers

High Throughput Direct Laser Interference Patterning of Aluminum for Fabrication of Super Hydrophobic Surfaces

Optimization of Welding Conditions for Sealing of Lithium-Ion Battery by Pulsed Nd:YAG Laser

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