“…In QCM based method we have identified around 16 possible chances of errors; some of them are already discussed under various sections above. These errors differ from system to system, type of material grade used, sample preparation steps followed, initial roughness, QCM sensitivity, type of QCM used, cooling arrangements, type of ion beam used, space charge accumulation at sample surface, secondary ionization state of ions, contamination effects from vacuum system, sticking coefficient dependency on angle, 36 Beam control at lower energy, Condensation of atoms on QCM sensor, Scattering of sputter material from the background gas, QCM single point source collection assumption, Beam energy accuracy etc. With these limitations the error in measurements can go upto 30%, 1,2 which can leads to discrepancy in the results.…”