Thin films of the composition Ce 0.9 Gd 0.1 O 2-δ and with a thickness of 200 nm were prepared on an Al 2 O 3 (0001) substrate at 720 • C or room temperature, to yield epitaxial or nanocrystalline materials. The effect of the microstructure on room temperature polarization were assessed by a combination of polarization with up to ±5 V using an AFM tip and a large silver back contact followed by surface potential mapping with Kelvin probe force microscopy. The nanocrystalline sample showed a low degree of polarization, which was reversible, and a fast relaxation process. The epitaxial thin film, in contrast, was already polarized at smaller biases and showed irreversible changes of the surface potential after polarization with +5 V. For lower biases, two distinct relaxation reactions were identified: a fast redistribution of charge over a large area in the first seconds after end of polarization and a slower process in the vicinity of the polarization contact, which took several minutes to relax. The slower polarization behavior is due to a bulk chemical diffusion process with a coefficient D δ on the order of 10 −17 m 2 • s −1 , whereas the faster polarization can be assigned to a charge carrier redistribution within a space charge layer.