Sub-picometer multi-wavelength detector based on highly sensitive nanomechanical resonator

Abstract

The wavelength division multiplexing (WDM) method for near infrared (NIR) optical fiber (1530–1565 nm) is the system that is wildly used for intercontinental communication. WDM achieves high-speed and large-capacity communication, but costs a lot because the high-resolution (∼10 pm) wavelength locker for wavelength stabilization only corresponds to a single wavelength. In this report, we propose a highly sensitive sub-picometer multi-wavelength detector that substitutes a typical single-wavelength detector for WDM. Our wavelength detector consists of a narrow band (FWHM < 10 nm) photonic absorber with an aligned gold nano-fin array on a high-Q (Q-factor > 20 000) nanomechanical resonator. The photonic absorber confines and transforms the illuminated NIR light wave into thermal stress, and then, the thermal stress in the nanomechanical resonator will appear as the eigenfrequency shift of the nanomechanical resonator. Through experimental works with an NIR laser and optical Doppler vibration meter, the sensitivity of our wavelength detector was determined to be 0.196 pm in the 10-nm-range of the NIR region. Our sub-picometer multi-wavelength detector will achieve a fast, wide-band, and cost-effective optical communication system.

Spectroscopic measurement of water using an electrostatic transducer with near‐infrared absorber

“…11 There are previous reports on optical measurement devices that utilize variation of resonance frequency due to thermal stress in transducers caused by light absorption. [12][13][14][15][16] The transducers are made of silicon nitride (SiN) or Si, and most typically, laser Doppler vibrometers are used to measure vibration amplitude and to detect resonance frequency changes. [12][13][14][15][16] There are also reports on integration of metal plasmonic structures to achieve high absorbance and wavelength dependence.…”

“…[12][13][14][15][16] The transducers are made of silicon nitride (SiN) or Si, and most typically, laser Doppler vibrometers are used to measure vibration amplitude and to detect resonance frequency changes. [12][13][14][15][16] There are also reports on integration of metal plasmonic structures to achieve high absorbance and wavelength dependence. 14,15 However, there is no information about Si-MEMS transducers based on a displacement detection principle suitable for portable devices, or on spectroscopic applications of such transducers.…”

“…[12][13][14][15][16] There are also reports on integration of metal plasmonic structures to achieve high absorbance and wavelength dependence. 14,15 However, there is no information about Si-MEMS transducers based on a displacement detection principle suitable for portable devices, or on spectroscopic applications of such transducers.…”

Ultra-thin Carbon Nanomechanical Resonator Fabrication and Its Dynamic Property Characterization

“…(4) Furthermore, displacement was detected with high sensitivity by integrating the resonator with a superconducting quantum interference device (SQUID) (5) and a single-electron transistor (SET). (6) In addition to these, the sensing of various targets was achieved, such as charge detection, (7) light detection, (8,9) and biomolecule detection. (10,11) The nanomechanical resonator is a useful device for sensitive sensing.…”

Robust Free‐Standing Nano‐Thin SiC Membranes Enable Direct Photolithography for MEMS Sensing Applications

“…[17] A common method to remove the Si substrate is the use of Si wet-etching employing different etchants such as KOH, TMAH, or HNA. [18][19][20][21] In many cases, Si wet-etching is more preferable than dry-etching owing to its low cost, simple equipment, high etch-rate, excellent material selectivity, as well as the capability of processing multiple wafers simultaneously. [22] However, since the Si-etchants are relatively aggressive, the metallization to form electrodes for SiC devices is a challenging issue.…”