2013
DOI: 10.1364/oe.21.020964
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Submicrometer 3D structures fabrication enabled by one-photon absorption direct laser writing

Abstract: We demonstrate a new 3D fabrication method to achieve the same results as those obtained by the two-photon excitation technique, by using a simple one-photon elaboration method in a very low absorption regime. Desirable 2D and 3D submicrometric structures, such as spiral, chiral, and woodpile architectures, with feature size as small as 190 nm have been fabricated, by using just a few milliwatts of a continuous-wave laser at 532 nm and a commercial SU8 photoresist. Different aspects of the direct laser writing… Show more

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Cited by 98 publications
(77 citation statements)
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“…It has been demonstrated, by analyzing fluorescence emission, that the SU8 photoresist linearly absorbs the excitation laser at 532 nm-wavelength [17]. For the LOPA CLSM, the intensity at the focusing region (of the order of 10 7 W/cm 2 ) is much higher than that at the input of the optical system (10 −2 W/cm 2 ), allowing the excitation and fluorescence detection of the focal spot volume only.…”
Section: Verification Of Lopa-based Fabricationmentioning
confidence: 99%
See 1 more Smart Citation
“…It has been demonstrated, by analyzing fluorescence emission, that the SU8 photoresist linearly absorbs the excitation laser at 532 nm-wavelength [17]. For the LOPA CLSM, the intensity at the focusing region (of the order of 10 7 W/cm 2 ) is much higher than that at the input of the optical system (10 −2 W/cm 2 ), allowing the excitation and fluorescence detection of the focal spot volume only.…”
Section: Verification Of Lopa-based Fabricationmentioning
confidence: 99%
“…been demonstrated [16,17], allowing one to combine the advantages of both OPA and TPA methods. Indeed, the LOPA method employs a simple, CW and low power laser, as in the case of conventional OPA, but it allows the optical addressing of 3D objects, as what could be realized by the TPA method, by using a combination of an ultralow absorption effect and a tightly focusing spot.…”
Section: Introductionmentioning
confidence: 99%
“…The DLW method mainly uses an ultrafast laser (femtosecond, fs or picosecond, ps lasers) [7] but recently continuous wave (cw) lasers are also used for specific materials [8]. The laser …”
Section: Direct Laser Writingmentioning
confidence: 99%
“…This interaction has enabled the construction of a 3D biomimetic structure with high-resolution (from lm to nm) that could not have been obtained by traditional photolithography. 42 However, multi-photon polymerization requires the laser beam to pass through the entire photo-curable material without attenuation, which limits its application to only transparent materials, such as SU-8, 41 ORMOCERÒ, 42,43 ORMOCOMPÒ, 44 ORMOSILÒ, 45,46 zirconium based organic-inorganic hybrid material (SZ2080), [47][48][49] IP-L780 50 and biocompatible hydrogels. 51 With customsynthesized hybrid materials, 3D scaffolds can be fabricated with tunable geometries (e.g., porosity, pore size etc.)…”
Section: D Structure Fabrication Using Multi-photon Polymerizationmentioning
confidence: 99%