1992
DOI: 10.1063/1.107813
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Submicrometer modification of polymer surfaces with a surface force microscope

Abstract: We have used the sharp tip of a surface force microscope to make modifications with submicrometer dimensions on polymer surfaces. In this letter we show three examples: scribed grooves with widths less than 120 nm, raised areas with heights up to 1 nm above the original surface, and pits with depths of 6 nm. We also discuss possible sources of contrast in surface force microscope images that are not due to height variations in the surface topography. Because the surface force microscope can be used for both co… Show more

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Cited by 103 publications
(63 citation statements)
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“…In particular the PMMA resist bilayer process, commonly used in EBL, has been directly adapted [381]. These techniques have been named lift-off lithography with AFM [382] or ploughing with AFM [383][384][385]. Another method is based on scanning near-field optical microscopy (SNOM), or better, laser ablation (irradiation) through a near-field optical probe [386,387].…”
Section: Introductionmentioning
confidence: 99%
“…In particular the PMMA resist bilayer process, commonly used in EBL, has been directly adapted [381]. These techniques have been named lift-off lithography with AFM [382] or ploughing with AFM [383][384][385]. Another method is based on scanning near-field optical microscopy (SNOM), or better, laser ablation (irradiation) through a near-field optical probe [386,387].…”
Section: Introductionmentioning
confidence: 99%
“…Fig. 9 shows the simulation curve using (14) and the experimental data. When the UV-induced machining depth is less than 1 nm, the experimental and simulation data have a good consistency, and the experimental data can be fitted well by quadratic polynomial expression.…”
Section: Experimental Results and Analysismentioning
confidence: 99%
“…Comparison of the simulation curve and experiment data. According to (14), we can obtain a curve relating the ultrasonic machining depth and amplitude.…”
Section: Experimental Results and Analysismentioning
confidence: 99%
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“…AFM can also be applied to manipulate, especially cut samples at nanometric scale (Irmer et al, 1998;Jin and Unertl, 1992;Magno and Bennet, 1997;Sumomogi et al, 1994;Thalhammer et al, 1997;Yu et al, 2005). Light microscopy is affected by limited resolution, which imposes undesirable restrictions to research activities (Stanislav, 2005).…”
Section: Introductionmentioning
confidence: 96%