We describe a new concept for producing, on a single substrate, a two-dimensional array of optical interference filters where the pass-band of each element can be independently specified. The interference filter is formed by optically contacting two dielectric mirrors so that the top quarter-wave films of the two mirrors form a Fabry-Perot cavity having a half-wave thickness. In the new device, we propose to etch an array of sub-wavelength patterns into the top surface of one of the mirrors before forming the cavity. The patterns must have a pitch shorter than the operational wavelength in order to eliminate diffraction. By changing the index of refraction of the half-wave layer, or the optical thickness of the cavity, the patterning is used to shift the pass-band and form an array of interference filters. One approach to producing the array is to change the fill factor of the pattern. Once the filter array is produced it may be mated to a two-dimensional detector array to form a miniature spectrophotometer.KEYWORDS: sub-wavelength structures, interference filter, spectrophotometer,
CURRENT TECHNOLOGY FOR FILTER ARRAYSOptical interference filters appear in a number of forms. The class of filters with the highest transmission and narrowest linewidths are Fabry-Perot filters. These filters are formed by sandwiching a half-wave (or some multiple thereof) spacer layer between two mirrors. The lowest absorptive losses are found in mirrors made from multilayer dielectric stacks that are usually quarter-wave in thickness. The pass-band of these filters (i.e. the center wavelength, b)is determined by the optical thickness of the spacer layer. The bandwidth is determined by both the optical thickness of the spacer layer and the reflectivities of the two mirrors. The most common Fabry-Perot filters commercially available have pass-bands that are spatially uniform with variations as small as 0.1%. Filters with spatially varying pass-bands are also commercially available and are manufactured by proportionally varying the thickness of all the layers uniformly across the surface of the filters. These filters, called wedge filters, are either circular (circular variable filter -CVF) or linear (linear variable filter -LVF). In the former, the thicknesses of the multilayer films vary linearly with the angular position on a circular substrate; in the latter, they vary linearly with position across a rectangular substrate.Although wedge filters are widely used, they have several limitations. First, it is not possible to have both large dispersion (>> 10 d m m ) and retain other desirable characteristics. The dispersion is proportional to the wedge angle; however, a large wedge angle results in poor transmission characteristics (due to n o n -n o d reflections fiom the angled mirror facet), and an increase in spectral bandwidth (due to wavefront inhomogenity across the angled facets). Owing to these limitations, wedge filters are large (e.g. typical LVFs in the 300 nm -700 nm spectral range are 60 mm in length) and have dis...