1983
DOI: 10.1063/1.93979
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Submicrometer periodicity gratings as artificial anisotropic dielectrics

Abstract: Gratings of dielectric material can act as homogeneous birefringent materials if the wavelength of the incident radiation is greater than twice the period of the grating. For the case of square profile gratings, simple equations predict the birefringence versus linewidth-to-period ratio of the gratings. By using x-ray lithography and reactive ion etching, 240-nm period gratings of polymethylmethacrylate and silicon nitride were fabricated with various linewidths. The birefringence of these was measured at 632.… Show more

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Cited by 195 publications
(102 citation statements)
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“…(1) and (2), it is seen that the etched layer has an index of refraction that is different for differing polarizations. This birefringence can be quite large and has been measured experimentally (for a single layer of patterned SiOl) to be as much as An = nL-9 = 0.06 '.…”
Section: Anew Technologymentioning
confidence: 97%
“…(1) and (2), it is seen that the etched layer has an index of refraction that is different for differing polarizations. This birefringence can be quite large and has been measured experimentally (for a single layer of patterned SiOl) to be as much as An = nL-9 = 0.06 '.…”
Section: Anew Technologymentioning
confidence: 97%
“…Analytical expressions for the tensor elements can be derived analytically using effective medium theory [11,12,17,18]. The geometry and definitions for this analysis are summarized in Figure 1.…”
Section: Derivation Of Effective Medium Parametersmentioning
confidence: 99%
“…The output signal i,, of the mth photodetector Dm is still given by Eq. (1), where the mth projection vector a, is now given by (5) In general, det(A) =# 0 and the instrument matrix is nonsingular. Singularities occur when any of the multiplied factors in Eq.…”
Section: Photopolarimeter Based On Planar Grating Diffractionmentioning
confidence: 99%