Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation

Lu, Qiuyu; Wang, Chen; Bai, Jian; Wang, Kaiwei; Lian, Wenxiu; Lou, Shuqi; Jiao, Xiangquan; Yang, Guoguang

doi:10.1364/ao.54.004188

Cited by 35 publications

(16 citation statements)

References 17 publications

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“…The accuracy mainly depends on the phase measurement accuracy of the single wavelength measurement. According to the previous work, the noise level of the whole system except the phase meter was around 1 mV [ 11 , 28 ], wihch is much smaller than the noise level of the AD8302 (~10 mV); therefore, we get the estimated resolution of this prototype as

…”

Section: Prototype Setup and Experimental Resultsmentioning

confidence: 99%

“…For example, inertial navigation and gravitational wave detection pose a significant challenge at an extremely high resolution, typically on the order of micro-g to nano-g [ 3 , 4 ]. This requires a low noise level and superior sensitivity, which involve the acceleration-displacement sensitivity of a micromachined structure [ 5 , 6 , 7 ] and displacement measurement sensitivity [ 8 , 9 , 10 , 11 ]. Optomechanical accelerometers based on interferometric readouts are capable of meeting the requirement of high resolution because of the high displacement resolution achieved by optical methods and good electromagnetic immunity [ 12 , 13 , 14 , 15 , 16 ].…”

Section: Introductionmentioning

confidence: 99%

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Optical Acceleration Measurement Method with Large Non-ambiguity Range and High Resolution via Synthetic Wavelength and Single Wavelength Superheterodyne Interferometry

Pan

Bai

et al. 2018

Sensors

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Interferometric optomechanical accelerometers provide superior resolution, but the application is limited due to the non-ambiguity range that is always less than half of the wavelength, which corresponds to the order of mg. This paper proposes a novel acceleration measurement method based on synthetic wavelength and single wavelength superheterodyne interferometry to address this issue. Two acousto-optical modulators and several polarizers are introduced to the two-wavelength interferometry to create four beams with different frequencies and polarization states, and two ultra-narrow bandwidth filters are used to realize the single wavelength measurement simultaneously. This technique offers the possibility to expand the non-ambiguity range without compromising the high resolution. Also, the superheterodyne phase measurement and the corresponding processing algorithm are given to enable real-time measurement. A prototype is built and the preliminary experimental results are compared with the simulation results, showing good agreement. The results prove an estimated acceleration measurement resolution of around 10 μg and a non-ambiguity range of larger than 200 mg, which is more than 100 times that of the single wavelength-based optical accelerometer.

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…”

Section: Prototype Setup and Experimental Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Optical Acceleration Measurement Method with Large Non-ambiguity Range and High Resolution via Synthetic Wavelength and Single Wavelength Superheterodyne Interferometry

Pan

Bai

et al. 2018

Sensors

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“…Lu et al [ 77 ] (2017) at Zhejiang University developed an optical MEMS accelerometer, similar to the design of the Sandia National Laboratory [ 73 ], by measuring the acceleration through the change of the interference pattern produced by two gratings, as shown in Figure 16 . One grating was suspended above the proof mass and the other was on the surface of the proof mass to form a cavity between the two gratings [ 78 , 79 , 80 ]. With light illuminated on the top grating by a laser source, part of the light was transmitted to the bottom grating and reflected to produce an interference pattern, which was detected by a photodiode.…”

Section: Mems Accelerometers With Signal Readout Methods Of Highermentioning

confidence: 99%

Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

Wang

Chen

Wang

et al. 2020

Sensors

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This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers are analyzed. Different types of micromachined accelerometers with a noise floor below 1 µg/√Hz are discussed. Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface circuit; (v) with sensing schemes leading to a high scale factor. Finally, the characteristics of various micromachined accelerometers and their trends are discussed and investigated.

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“…Two photodiodes along with two followers and a differential circuit are employed to realize differential measurement using an ambient light. incident laser was 632.8 nm, and two photodiodes with a responsivity of 0.33 V nW −1 were adopted to achieve differential measurement with ambient light [43]. Furthermore, a thermal electrical refrigerator (TEC) was adhered to the optomechanical cavity to adjust the temperature of the sensing structure.…”

Section: Rough Empirical Evidencementioning

confidence: 99%

Determination of thermally induced effects and design guidelines of optomechanical accelerometers

Bai

Wang

et al. 2017

Meas. Sci. Technol.

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Thermal effects, including thermally induced deformation and warm up time, are ubiquitous problems for sensors, especially for inertial measurement units such as accelerometers. Optomechanical accelerometers, which contain light sources that can be regarded as heat sources, involve a different thermal phenomenon in terms of their specific optical readout, and the phenomenon has not been investigated systematically. This paper proposes a model to evaluate the temperature difference, rise time and thermally induced deformation of optomechanical accelerometers, and then constructs design guidelines which can diminish these thermal effects without compromising other mechanical performances, based on the analysis of the interplay of thermal and mechanical performances. In the model, the irradiation of the micromachined structure of a laser source is considered a dominant factor. The experimental data obtained using a prototype of an optomechanical accelerometer approximately confirm the validity of the model for the rise time and response tendency. Moreover, design guidelines that adopt suspensions with a flat cross-section and a short length are demonstrated with reference to the analysis. The guidelines can reduce the thermally induced deformation and rise time or achieve higher mechanical performances with similar thermal effects, which paves the way for the design of temperature-tolerant and robust, high-performance devices.

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Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation

Cited by 35 publications

References 17 publications

Optical Acceleration Measurement Method with Large Non-ambiguity Range and High Resolution via Synthetic Wavelength and Single Wavelength Superheterodyne Interferometry

Optical Acceleration Measurement Method with Large Non-ambiguity Range and High Resolution via Synthetic Wavelength and Single Wavelength Superheterodyne Interferometry

Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

Determination of thermally induced effects and design guidelines of optomechanical accelerometers

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