2005
DOI: 10.1117/12.624865
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Substantial progress in optical monitoring by intermittent measurement technique

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Cited by 20 publications
(17 citation statements)
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“…The corresponding spectral function is a beam splitter with both theoretical transmittance and reflectance between 0.4996 and 0.5003 nm in the 500 to 800 nm range. This design method is a global optimization procedure inspired by [14]. Only an accurate set of thicknesses can provide a satisfying spectral response.…”
Section: A Choice Of Different Test Designsmentioning
confidence: 99%
See 2 more Smart Citations
“…The corresponding spectral function is a beam splitter with both theoretical transmittance and reflectance between 0.4996 and 0.5003 nm in the 500 to 800 nm range. This design method is a global optimization procedure inspired by [14]. Only an accurate set of thicknesses can provide a satisfying spectral response.…”
Section: A Choice Of Different Test Designsmentioning
confidence: 99%
“…One possibility is to compare experimental and theoretical values of the transmittance as the criteria for stopping the deposition process. If refractive indexes are well known, with an accurate reproducibility, this technique can be really efficient [14]. The turning point monitoring (TPM) [1] is a variant consisting of choosing the analysis wavelength for which transmittance versus thickness presents a local extremum at the end of the concerned layer.…”
Section: Optical Monitoring At a Single Wavelengthmentioning
confidence: 99%
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“…Substantial progress with direct optical monitoring in intermittent mode on single rotating substrate holders was reported in 2005 [1]. Since that time this monitoring technique was successfully applied in a large number of box coaters on dome shaped calottes up to 1500mm in diameter.…”
Section: Introductionmentioning
confidence: 98%
“…4 During the process of manufacturing, in situ measurements are taken to calculate optical properties of the layer deposited on the substrate. This allows to compensate for the manufacturing errors in the current layer with the subsequent one.…”
Section: Introductionmentioning
confidence: 99%