“…Soft magnetic thin films (SMTFs) with adjustable high-frequency magnetic properties are highly desirable due to their wide range of applications, such as film inductors, [1,2] micro-transformers, [3] and microwave noise filters, [4,5] etc. Various methods have been proposed for the development of these SMTFs, such as chemical substitution, [6][7][8][9][10] high temperature and high magnetic field annealing, [11][12][13][14][15] crystal texture, [16] and hydrogen ion implantation, [17][18][19][20] etc. Among these methods, hydrogen implantation has been shown to be a powerful platform to tailor the physical properties of both transition metal oxides and various kinds of metal alloys.…”