Substrate cleaning using a remote hydrogen rf-plasma

Abstract

My sincere thanks to Katie Ziemer; who helped me in carrying out my experiments and also in the analysis of my data. I would also like to thank Jeff Gold and Vikram Tolani for their help in the lab I am really thankful to my friends Ganesh, Ravi, Srikanth, Ramani and Anand for making my stay in Morgantown truly memorable. Finally, I wish to thank my family in India for their love and support through the course of my education in the United States v