Substrate effects on the structure of epitaxial PbTiO3 thin films prepared on MgO, LaAlO3, and SrTiO3 by metalorganic chemical-vapor deposition

Foster, C. M.; Li, Z.; Buckett, M. I.; Miller, Douglas E.; Baldo, P. M.; Rehn, L. E.; Bai, G. R.; Guo, Dongyun; You, Hoydoo; Merkle, K. L.

doi:10.1063/1.360121

Cited by 173 publications

(53 citation statements)

References 30 publications

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“…Similar difficulties were reported for MOCVD PZT films on STO. 11,12 We ascribe this to an insufficient coupling strength as a result of surface roughness, although the rms roughness is only 1 nm for these films. The small dimensions of the substrate ͑1 by 1 cm͒ did not allow for quantitative loss measurements of the TE modes.…”

Section: Waveguide Experimentsmentioning

confidence: 99%

“…The values of the refractive index are in very good agreement at 633 nm with reported values. 8,11,12,20 The zone-2 data were fitted by a Cauchy fit of the form…”

Section: A Refractive Indexmentioning

confidence: 99%

“…Three articles were found on PLZT ceramics and sol-gel films [8][9][10] and two on metalorganic chemical vapor deposition ͑MOCVD͒ PZT films. 11,12 In this article, we report on the optical properties of PZT films grown by MOCVD on STO. The PZT film composition studied spanned the full composition range from PT (xϭ0) to PZ (xϭ1).…”

Section: Introductionmentioning

confidence: 99%

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Optical properties of PbTiO3, PbZrxTi1−xO3, and PbZrO3 films deposited by metalorganic chemical vapor on SrTiO3

Moret

Devillers

Wörhoff

et al. 2002

Journal of Applied Physics

144

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Epitaxial PbZrxTi1−xO3 (PZT) films have been prepared by metalorganic chemical vapor deposition on SrTiO3 substrates. Two sets of films of thicknesses 50–100 and 700–1400 nm, containing 0%, 40%, 60%, and 100% Zr, were prepared and investigated. The refractive index n was determined by ellipsometry for the thin films and by reflectivity for the thicker films. Results were obtained over the energy range from 1.55 to 3.72 eV, and with a Cauchy-fit extrapolation down to 0.62 eV. The refractive-index curves show a systematic variation with composition. For all compositions, n is close to 3.2 at 3.72 eV (333 nm), while at 1.55 eV (800 nm) n is 2.35 for PZ (x=1) and 2.61 for PT (x=0). In agreement with previous results we find that the optical band gap is essentially independent of composition for PZT. We obtained 3.6±0.1 eV. The n(E) results were analyzed by a Wemple–DiDomenico dispersion analysis, yielding results for the dispersion region in the ultraviolet. Unlike the band gap, which is insensitive to composition in PZT, the dispersion energy Ed decreases from PT to PZ in the same fashion as the refractive index in the transparent region.

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Section: Waveguide Experimentsmentioning

confidence: 99%

“…The values of the refractive index are in very good agreement at 633 nm with reported values. 8,11,12,20 The zone-2 data were fitted by a Cauchy fit of the form…”

Section: A Refractive Indexmentioning

confidence: 99%

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Optical properties of PbTiO3, PbZrxTi1−xO3, and PbZrO3 films deposited by metalorganic chemical vapor on SrTiO3

Moret

Devillers

Wörhoff

et al. 2002

Journal of Applied Physics

144

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“…͑Pseudocubic axis notation is used for the SRO.͒ 6 The ferroelectric PZT film thickness was less than the critical thickness for strain relaxation by a-domain ͑90°͒ twins. 7,8 Planar 250 m diameter capacitor structures were formed by room temperature electron-beam evaporation of discrete polycrystalline silver top electrodes through a shadow mask onto the continuous oxide film.High resolution x-ray scattering experiments were performed on the Basic Energy Sciences Synchrotron Radiation Center ͑BESSRC-CAT͒ undulator beamline 12ID-D at the Advanced Photon Source using monochromatic 14.5 keV xrays ( ϭ0.855 Å). …”

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X-ray scattering evidence for the structural nature of fatigue in epitaxial Pb(Zr, Ti)O3 films

Thompson

Munkholm

Streiffer

et al. 2001

Applied Physics Letters

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We have probed the microscopic distribution of 180°domains as a function of switching history in 40 nm epitaxial films of Pb͑Zr 0.30 Ti 0.70 ͒O 3 by analyzing interference effects in the x-ray scattering profiles. These as-grown films exhibit voltage offsets ͑imprint͒ in the polarization hysteresis loops, coupled with a strongly preferred polarization direction in the virgin state. Our x-ray results are consistent with models attributing the loss of switchable polarization to the inhibition of the formation of oppositely polarized domains in a unipolar matrix. One of the limitations of utilizing ferroelectric films for applications such as nonvolatile memories, is the tendency of some materials, e.g., Pb͑ZrTi͒O 3 , to exhibit a loss of switchable polarization with increasing switching cycles, a phenomenon known as fatigue. Fatigue may arise from several different underlying physical mechanisms. Two mechanisms are most frequently discussed. 1 In the first, fatigue occurs by pinning of ferroelectric domain walls within the bulk of a film containing a mixture of oppositely polarized domains. In the second, fatigue is the result of inhibition of the growth of oppositely polarized domains due to nucleus suppression at the film-electrode interfaces of a uniformly polarized matrix. By analysis of the electric field dependence of permittivity as a function of degree of fatigue in polycrystalline film, Colla et al. 1 have concluded that the primary fatigue mechanism under normal cycling conditions is nucleus suppression. Piezoresponse atomic force microscopy ͑AFM͒ studies 2 have found that the fatigued state can have a preferential polarization, and it has been found that fatigue can be reduced by asymmetric switching voltages. 3 These results also support a nucleus suppression model.In this letter, we report x-ray interference characterizations of the domain configurations after successive polarization reversals in ferroelectric heterostructures incorporating top and bottom electrodes. Interference effects occurring in x-ray scattering profiles of high-quality epitaxial ferroelectric films are extremely sensitive to the distribution of oppositely polarized ͑180°͒ domains. This method has been used previously to determine the unipolar character of the native 180°d omain distribution for an epixatial PbTiO 3 film on SrTiO 3 . 4 Here, we use this method to study the structural nature of fatigue in ferroelectric films. This x-ray technique provides direct characterization of the relative population of the two domains averaged over a macroscopic region, complementary to both electrical and AFM characterizations.The interference effects upon which this scattering technique relies require very high structural coherency between the film and substrate, which serves as a phase reference. Therefore, we have investigated a model epitaxial heterostructure consisted of a 40 nm ͑001͒ Pb͑Zr 0.3 Ti 0.7 ͒O 3 ͑PZT͒ film grown by metalorganic chemical vapor deposition, 5 on a 136 nm ͑001͒ SrRuO 3 ͑SRO͒ film sputter deposited 6 on a (001) ...

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Sol–Gel Electroceramic Thin Films

Calzada

2015

The Sol‐Gel Handbook

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Substrate effects on the structure of epitaxial PbTiO3 thin films prepared on MgO, LaAlO3, and SrTiO3 by metalorganic chemical-vapor deposition

Cited by 173 publications

References 30 publications

Optical properties of PbTiO3, PbZrxTi1−xO3, and PbZrO3 films deposited by metalorganic chemical vapor on SrTiO3

Optical properties of PbTiO3, PbZrxTi1−xO3, and PbZrO3 films deposited by metalorganic chemical vapor on SrTiO3

X-ray scattering evidence for the structural nature of fatigue in epitaxial Pb(Zr, Ti)O3 films

Sol–Gel Electroceramic Thin Films

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